HORIBA, Ltd.
The HORIBA Group of worldwide companies provides an extensive array of instruments and systems for applications ranging from automotive R&D, process and environmental monitoring, in-vitro medical diagnostics, semiconductor manufacturing and metrology, to a broad range of scientific R&D and QC measurements.
- +81 75 313 8123
- +81 75 321 0752
- info@horiba.co.jp
- 2, Miyanohigashi,
Kisshoin
Minami-Ku, Kyoto 601-8510
Japan
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Product
Optical Fiber Type Hot Phosphoric Acid Concentration Monitor
CS-620F
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In 3D NAND manufacturing process, dozens of layers of SiO2 and SiN are deposited, and the SiN layer is selectively removed using hot phos.In this process, the desired etching rate can be achieved by controlling the concentration and temperature of the chemical solution.Previous products have difficulty to measure high temperature chemicals, but the CS-620F is able to measure at high temperatures up to 170 C degrees.
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Product
Dilution / Sampling Systems
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HORIBA offer a full range of full flow CVS and partial flow systems for exhaust gas measurement that cover the requirements of all of the global emissions standards. These are complemented by a full range of solutions for the measurement of particulate mass and particulate number required to meet the latest legislative standards.
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Product
Camera for Infrared Thermometer IT-480, for use with Mobile Phone
IT-480camera
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IT-480camera is used with the infrared thermometer IT-480. Photos and videos of the object, which surface temperature was measured from the distance by non-contact infrared-thermometer, can be saved by using the Android device camera.
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Product
Particulate Filter Management System
PFS-ONE
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The highly precise weighing of emission particles has become increasingly important due to new legislative regulations such as Euro 6, WLTP, EPA 1066 or PM 10. PFS-ONE, the Particulate Filter Management System offers different weighing methods. This supports full compliance with current legislation in the automotive and environmental industry and also allows for flexibility of internal testing processes. The system covers the measurement, organization, tracking and control of particulate filter weighing. Built as a modular system, the PFS-ONE can be expanded from a stand-alone installation up to a fully integrated laboratory module and can be used for manual weighing or automated weighing via a robot.
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Product
Ultra-thin Mass Flow Controller
DZ-100
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The DZ-100 inherits the same CRITERION™ technology—a differential pressure detection system for laminar viscous flow ranges—used on HORIBA STEC’s MFC, the D500. This innovative technology controls the mass flow of various gases with high precision. As with the D500, the user-configurable DZ-100 supports multi-range and multi-gas applications. The compact design of the MFC reduces the internal volume of the internal gas flow path, and the optimized control algorithm improves response characteristics. It uses a compact CPU with high processing capacity, and the piezo drive circuit and control CPU are installed in the MFC module while the power supply components are housed in a separate small control box. Up to four MFC modules can be controlled by connecting them with the dedicated miniature connectors.
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Product
Citric Acid Monitor
HE-960CA
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High precision, wide-range citric acid monitor having chemical resistance sensor. Measurement range : 0 - 2%.
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Product
Pitot Tube Flow Meter
PTFM-1000V2
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The Pitot Tube Flow Meter, PTFM-1000V2 is a standalone interface for measuring exhaust gas flow rate of combustion engines. The system uses the tried-and-tested pitot tube principle with high-frequency transducers to accurately measure highly pulsating exhaust flows with a sampling rate of 1kHz. This rapid capture rate ensures that any pulsations or exotic behaviour in an engine is measured, and the unique design of the PTFM pitot tube means reverse flows can be measured with the same guarantee of sensitivity. The interface can be run standalone with a laptop, or seamlessly integrated to run alongside an analyser system without adding any more steps to the test cycle process.
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Product
Fuel Flow Measurement Systems
FQ Series
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Measuring a vehicle’s fuel flow requires a precise system which can run stationary and transient tests. It must also be able to offer high reproducibility and run cycle measurements under real operational conditions, including WLTP. Our FQ Series of fuel flow measurement systems offers a highly precise method of measuring various fuel types, and covers the full range from small engines (incl. single-cylinder research engines) up to heavy-duty engines with up to 5000 kW.
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Product
Large Cryogenic Mill that Accomodates Sample Sizes from 0.1 to 100 Grams
Shaqer 1500
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The ShaQer™ offers high throughput and improved pesticide extraction for QuEChERS Sample Prep! It agitates up to six samples simultaneously compared to just two samples processed by hand. The vigorous clamp movement results in thorough extraction of pesticide residue in fruit and vegetables. Every sample is handled in the same manner ensuring consistency and eliminating variations that can occur in manual sample prep. It also accommodates a variety of tube sizes and shapes. CE Approved.
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Product
Hyperspectral Imaging Spectrometer
Hyperspectral PoliSpectra® H116
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HORIBA has developed a unique hyperspectral imaging spectrometer with an integrated scientific CMOS camera (12-16 bit) featuring HDR (95dB Dynamic Range and 1.7e- noise) and 95% Q.E peak efficiency:PoliSpectra® H116 features broad UV-NIR coverage in one acquisition (185-1050 nm) combined with the highest spectral resolution (<1 nm).
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Product
Stand-Alone Type Chemical Concentration Monitor
CS-100 Series
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The CS-100 Series offers a complete lineup of high precision chemical solution concentration monitors for various solutions in cleaning and etching processes during semiconductor manufacturing. In addition to the high-speed response and compact design, measurement of each component concentration is conducted in real-time and the timing of chemical solution changes and automatic supply is warned with an alarm. The ability to perform short measurement cycles allows for accurate monitoring of concentration changes.
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Product
Laser Scattering Particle Size Distribution Analyzer
Partica mini LA-350
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HORIBA's new LA-350 Laser Diffraction Particle Size Distribution Analyzer is the ideal combination of performance, price, and packaging. The LA-350 excels in applications as diverse as slurries, minerals, and paper chemistry. Based on the advanced optical design of previous LA-series analyzers, the LA-350 strikes a harmonious balance between high-functionality, easy operation, low maintenance, and cost-effectiveness.Bench space is used efficiently due to the LA-350’s compact size (297 mm x 420 mm). The clever design and precision, high quality manufacturing ensure convenient, reliable operation and accurate results, now with a wider size range (0.1-1,000 µm).
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Product
Compact Baking System
LSC series
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HORIBA's best-selling baking system has been developed to meet the requirements of today’s high technology industries. Without the need of a carrier gas, the system can provide stable vaporization of materials such as TEOS (at a rate of 600 SCCM) and H2O (at a rate of 2 SLM). For ease of access all device maintenance can be performed from the front of the unit.
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Product
High Temperature Digital Mass Flow Controller
SEC-8000 F/D/E Series
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The SEC-8000F/D/E series can operate in high temperature environments, from 15 ℃ to 120 ℃, for a variety of tasks including semiconductor and compound semiconductor processing.
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Product
Hydrofluoric Acid Monitor
CM-200A/210A
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The CM-200A/210A hydrofluoric acid monitors have been developed specifically to meet the stringent demands of semiconductor manufacturing. The CM-200A/210A provides a real time read-out of hydrofluoric acid concentration by measuring the electric conductivity of the sample solution. These superior units offer high repeatability even at low concentrations. The CM-200A/210A can be used for a variety of purposes ranging from monitoring etched wafer cleaning processes to any other industrial application of hydrofluoric acid.
