OAI
OAI is a leading manufacturer of reliable, precision equipment for MEMS, semiconductors, nanotechnology, cleanroom automation, and for UV light measurement.
- 800-843-8259
408-232-0600 - 408-433-9904
- sales@oainet.com
- 464 South Hillview Drive
Milpitas, CA 95035
United States of America
-
-
Product
Tabletop Front & Backside Mask Aligner
Model 200IR
-
The OAI Model 200IR Mask Aligner is a tabletop system that requires minimal clean room space. It is a cost-effective alternative for R&D or limited scale, pilot production. Utilizing an innovative, air bearing / vacuum chuck leveling system, the substrate is leveled quickly and gently, for parallel photo mask alignment and uniform contact across the wafer during contact exposure. The Model 200IR Mask Aligner is capable of one micron resolution and alignment precision. It has an alignment module which features mask insert sets and quick-change wafer chucks that enable the use of a variety of substrates and masks without requiring tools for reconfiguration. The alignment module incorporates micrometers for X, Y, and z-axis.
-
Product
Automated Mask Aligner with Integrated Mask Changer
Model 6000A-MC
-
The Model 6000A-MC is a precision system combining OAI’s Model 6000, Automated Production Mask Aligner, with an integrated mask changer. The mask changer can handle from 10 to 150 masks. Ideal for both semiconductor and bio-tech applications. It also is designed with a bar code reader to assure each mask is coordinated to the right process. Please contact OAI for further product information.
-
Product
Handheld UV Intensity/Power Meter
Model 308
-
Dependable and repeatable, The OAI Model 308 UV Intensity/Power Meter is precise, direct-reading instrument designed to measure UV light intensity. The Model 308 features detachable probes for use in the UVA, UVB and UVC ranges, plus a high speed serial port and is available with an optional software package that facilitates instant data logging of intensity mode, time, wave length, serial number and calibration due date.
-
Product
Continuous Wave Solar Power Meter
-
The OAI Continuous Wave Solar Power Meter is an essential analytical tool for measuring the irradiance (in Suns) of Continuous Wave Solar Simulators. OAI’s Solar Power Meters feature unique features not found in other Solar Meters. This versatile meter can display a wide variety of cell characteristics that include: cell type, window type, cell size, and temperature measurement device type. The OAI Continuous Wave Solar Power Meter can sample and display a continuous reading or peak reading. The Power Meter connects via USB port for data collection, and includes desktop software. With this small, portable, battery-powered meter, numerous production solar simulators can be tested and compared in a short amount of time, leading to greater production line consistency and throughput.
-
-
Product
TriSOL Class AAA 0.25º Collimation Angle Solar Simulators
-
For high performance space applications, OAI offers a 0.25 Collimation Angle Solar Simulator. It is engineered with the technology built on OAI’s 47 years of experience working with light. Features include 100mmx100mm beam size, long lens housing, AM 1.5 G and AMO spectrum up to 1800 nm or any custom spectrum, and intensity controlled up to 1.25 SUNS. These solar simulators are built with OAI’s precision, quality and reliability.
-
Product
Standard Class AAA Solar Simulator
TriSOL TSS
-
Essential for testing virtually any material or product that is exposed to sunlight for long or short periods of time, OAI’s low-cost, Standard Solar Simulators deliver highly collimated, uniform light. Depending on configuration, output on these Solar Simulators is rated at 350W -5,000W.These Class AAA Solar Simulators feature OAI’s Advanced Uniform Beam Optics and are available with a choice of air mass filters to reproduce a wide range of solar spectra. For added flexibility, OAI’s proven lens and collimating mirror technology allows for a variety of exposure area sizes. A Class AAA Solar Simulator is an essential tool for manufacturing as well as R&D; it is indispensable in test labs, industry, and in universities. OAI Standard Solar Simulators are used in photobiology, biomedical, solar cell testing, cosmetic testing, and paints & coatings analysis. Based on 35+ years of proven UV light technology, OAI Solar Simulator Systems deliver repeatable, reliable, constant output, and measurement uniformity.
-
Product
Wafer Bonder
AML
-
Wafer bonding has found many applications in the field of MST, MEMS and micro engineering. These include the fabrication of pressure sensors, accelerometers, micro-pumps and other fluid handling devices. The process is also used for first-order packaging of silicon microstructures to isolate package-induced stresses. The OAI AML Wafer Bonder facilitates both the alignment and bonding to be performed in-situ, in a high vacuum chamber. For anodic bonding the wafers are loaded cold and heated in the process chamber. For high accuracy alignment the wafers are aligned and brought into contact only after the process temperature has been reached, thus avoiding differential thermal expansion effects which can compromise alignment. The AML Wafer Bonder is excellent for anodic bonding, silicon direct and thermal compression bonding applications. These features enable the bonder to be used with virtually any processing tool.
-
Product
TriSOL Large Area Solar Simulators
-
OAI has designed and engineered for large area markets Class AAA, ABA, or ACA Solar simulators with the same performance , quality, and reliability as our other solar simulator models. These large area solar simulators are available in several models.
-
Product
Exposure Systems
Model 2000AF & 2000SM
-
The OAI Model 2000 Exposure Systems may be configured as either an edge-bead exposure system (2000SM) or a flood exposure system (2000AF); both configurations are based on OAI’s proven, time-tested platform.
-
Product
Light and Energy Meter
Model 659
-
UV Light and Energy Meter for use with all wafer steppers. For over 45 years, OAI is a world leader in UV Light and Energy Measurement Instrumentation used for reliable accurate calibrated control of the photolithography processes in the Semiconductor, MEMS, Wafer Packaging and Wafer Bumping Industries. The New Model 659 is an advanced UV exposure analyzer specifically designed for use with all wafer steppers including high intensity wafer steppers. This meter averages up to 400 exposure readings, has Ethernet and USB interface for downloading recorded measurements, and has intensity range of up to 7,500mW/cm2. Probes are available in wavelength of 365nm, 400nm, 420nm & 436nm. OAI has a complete certified calibration lab to maintain the performance, quality and reliability of our meters. The Model 659 meter is traceable to NIST standards.
-
Product
Automated Front & Backside Mask Aligner System
Model 6000
-
With over 4 decades of manufacturing in the semiconductor industry, OAI meets the growing challenge of a dynamic market with an elite class of production photolithography equipment. Built on the proven OAI modular platform, the Model 6000 has front and backside alignment that is fully automated with a submicron printing capability as well as submicron top to bottom front side alignment accuracy which delivers performance that is unmatched at any price. Choose either topside or optional backside alignment which uses OAI’s customized advanced recognition pattern software. These Mask Aligners have OAI’s Advanced Beam Optics with better than ±3% uniformity and a throughput of 200 wafers per hour in first mask mode, which results in higher yields. The Series 6000 can handle a wide variety of wafers from thick and bonded substrates (up to 7000 microns), warped wafers (up to 7 mm-10mm), thin substrates (down to 100 micron thick), and thick photo resist.
-
Product
Calibrated Solar Reference Cell
-
To insure repeatable testing on any solar simulator, OAI offers 2cm x 2cm calibrated reference cells. Standard reference cell calibration cycles can be set up by OAI''s calibration laboratory to insure that your reference cell maintains certification.
-
