Advanced Energy
Advanced Energy shapes and transforms how power is used, delivered, and managed. Advanced Energy has devoted decades to perfecting power for its global customers. We design and manufacture highly engineered, precision power conversion, measurement, and control solutions for mission-critical applications and processes.
- 800.446.9167
+1.970.221.0108 - 1595 Wynkoop Street,
Suite 800
Denver, CO 80202
United States of America
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E-Chuck Supplies
Advanced Energy's Trek e-chuck supplies have been a staple in the semiconductor industry for decades. They allow you to improve throughput, virtually eliminate sticky wafer and wafer popping issues, and reduce backside gas errors.
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Digitally-Tuned Matching
Navigator II
The Navigator® ll is equipped with microprocessor-controlled, stepper-motor drives, and advanced tuning algorithms — enabling optimized RF power. An optional internal Z’Scan® II RF sensor provides real-time analysis of process power and impedance — allowing you to quickly identify and significantly reduce process variability. Optional Virtual Front Panel software is available for monitoring and control through a user’s computer.
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Remote Plasma Source
Xstream
The highly efficient Xstream® RPS dissociates large volumes of NF3 and quickly cleans chambers, improving your overall tool performance. Its plasma chamber showcases high-purity aluminum alloy and patented cooling capabilities. Built to last for years without repair or expensive chamber coatings, the Xstream RPS is the smart choice for dependability and efficient performance.
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Piezo Drivers
Use Trek high voltage amplifiers to drive piezoelectric elements and piezoelectric (ferroelectric) material poling.
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Advanced SCR Power Controller
Thyro-PX Series
50 years of experience are infused in the Thyro-PX® series’ design and functionality. The SCR power controller is available in single-, dual-, and three-phase units, supports voltages from 690 V and 2900 A, and offers superior interface options. Integrate operating modes and parameters seamlessly with the 2.8-inch, LED Thyro-Touch display. And enable efficient system parameters, loading, and storage via an on-board SD-card. Thyro-PX power controller is ideally suited for your transformer and resistive loads for glass, metal, and ceramic manufacturing. It is optimal for heating elements in electric furnaces.
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Unprecedented Power Control
Ascent AP Series
Building on AE®’s premier bipolar pulsed-DC technology, Ascent® AP power supplies extend your ability to optimize output with advanced pulse shaping, as well as four-block progressive arc management that includes full voltage reversal and self-adjusting arc parameters. This compact solution’s patented pulsing technology proactively inhibits arcs, while its wide operational range unlocks material options to extend single- and dual-magnetron process flexibility and material innovation.
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Low Voltage Power Supplies
XF Series
The Excelsys XF low voltage power supplies provide up to 1000 W in an extremely compact 268 mm x 127 mm x 1U design. The XF family features plug-and-play architecture for maximum flexibility, allowing custom-power-solution configuration in less than five minutes. Conformal coating, ruggedization, and an operating temperature range of -55 to 70°C make it ideal for harsh environments. Offering up to 12 isolated outputs, the XF platform can provide output voltages up to 348 VDC.
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Pulsing and Pulse Waveform Control
Paramount Plus
Get the broadest feature set available in a pulsed-RF product. The Paramount Plus offers precise RF regulation, sophisticated pulse manipulation, and advanced data acquisition. Designed to cover an extensive range of RF energy — frequencies of 1 to 60 MHz and power levels of 1.5 to 15 kW — the Paramount Plus delivers the repeatability and reliability you require.
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High-Power Density
Apex
The versatile Apex® family of RF generators and power-delivery systems showcases a compact, modular design suitable for chamber mounting. Utilizing sophisticated RF-conversion technology, Apex RF generators and power-delivery systems offer enhanced product and process reliability. High-density power capabilities make them ideal for advanced plasma processes. And various communications models and configurable features allow you to customize your platform and explore integration approaches. No custom generator lead times are necessary.
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RF Plasma Generators
Choose from a broad range of RF plasma generators and access unique features for configuration, control, and application requirements. From various mounts and sizes to full digital control and plasma dynamic response, our RF generators can ignite your process innovation.
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Modular Power Supplies
CoolX1800 Series
Access incredible power via a compact supply. The modular Excelsys CoolX®1800 offers 1800 W in a 267 x 127 x 41 mm package (approximately 50% more power than the industry standard). Outputs can be parallel connected for higher currents and series connected for higher voltages (up to 348 VDC).
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3000 W Modular Power Supplies
CoolX3000 Series
Advanced Energy's reliable Excelsys CoolX®3000 series delivers an incredible 3000 W in a 300 x 131 x 120 mm package. This makes it the smallest modular, configurable, 3000 W power solution in the market. With industry-leading specifications including <91% efficiency, PMBus™ digital and analog communications and control, and a comprehensive feature set, the CoolX3000 sets the industry standard in terms of flexibility, reliability, and efficiency.
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Low Voltage Power Supply Solutions
AC-DC Configurable. Advanced Energy is proud to offer highly reliable and cost-efficient low voltage power supply solutions. The Excelsys low voltage power supply product line has more than 20 years of experience of engineering power-density rich and extremely efficient supplies for a variety of markets.
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High Voltage Products
Advanced Energy's high voltage products feature high-performance power supplies and amplifiers. Each product line features hundreds of units, options, and accessories to meet your application needs.
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Electrostatic Voltmeters
Advanced Energy's Trek and Monroe electrostatic voltmeters allow you to accurately measure surface potential (voltage) on materials. Choose from
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TREK, INC.
Designs and Manufactures EOS/ESD Measurement Instrumentation, Electrostatic Voltmeters and High-Voltage Power Amplifiers. Custom OEM and Standard Products are available.
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TEGAM Inc.
TEGAM designs, manufactures and calibrates instrumentation that impacts your daily life in surprising ways. Our goal is to make your measurement task easier, faster and more accurate. We continuously invest in R&D of products and calibration techniques that allow you to make your critical measurements with the highest confidence. Our electrical measuring capabilities include temperature, RF power, and micro-Ohms.
