Plasma Generators
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Product
RF Plasma Generators
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Choose from a broad range of RF plasma generators and access unique features for configuration, control, and application requirements. From various mounts and sizes to full digital control and plasma dynamic response, our RF generators can ignite your process innovation.
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Product
GHW Series 13.56 MHz, 1.25, 2.5, And 5.0 KW High-Reliability RF Plasma Generators
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The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield. They are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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KEINOS™ 2 MHz 5 KW, 11 KW & 13 KW RF Plasma Generators
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The KEINOS™ 2MHz plasma generator builds on the solid, reliable attributes of the existing 2MHz design. KEINOS™ incorporates the latest technology from MKS to enable demanding applications of pulsing, fast impedance changes and shorter process steps. KEINOS™ can deliver up to 13kW of power, pulsing up to 50KHz, multiple set point pulsing, pulse shaping and MKS patented frequency tuning. KEINOS™ uses an integrated VI sensor for power accuracy and digital based control for fast response times.
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Remote Plasma Sources
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Semiconductor and Electronic Thin Film applications use plasma sources to generate low-energy ions and radicals to react with material surfaces and chamber walls to remove contaminants and act as a precursor to aid in material deposition. MKS provides multiple options for radical generation including Toroidal and Microwave based Remote Plasma Sources supporting Fluorine, NF3, oxygen, nitrogen and hydrogen process chemistries.
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In Situ Diagnostics
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For researchers working on ultra thin films and novel interfaces, Neocera offers insitu, real-time process control and diagnostic tools such as high-pressure RHEED, Low Angle X-ray Spectroscopy (LAXS) and Ion Energy Spectroscopy (IES). RHEED provides exceptional growth control via RHEED intensity oscillations and the Structural data via diffraction. LAXS is a complimentary to RHEED and provides real-time Compositional information. IES provides energetics of the laser generated plasma plume which is directly responsible for obtaining high quality films and interfaces.
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Low Frequency RF Broadband Power Sources
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Class A has RF power source, ideal for Industrial /Scientific / Medical applications. Class AS is a robust source of RF power for ultrasonic, laser modulation, RFI/EMI, plasma generation, general laboratory and industrial applications.
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High Power Microwave Plasma System
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The High Power Microwave Plasma System features the High Power Microwave Plasma Source, generator (with isolator) and auto-tuning system comprised of the Precision Power Detector and SmartMatch® unit. This comprehensive system delivers a high concentration of radicals with low electron temperatures for the highest dissociation and lowest recombination rates.
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Elite™ 13.56 MHz RF Plasma Generators
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The elite™ Series of RF plasma generators provides state-of-the art technology in a compact air-cooled package. The elite is designed with high speed closed loop control, a class E RF deck and a switching modulator for superior output performance. The elite design utilizes a single printed circuit board assembly for the full rack product virtually eliminating all internal wires and connectors and thereby providing the highest reliability available.
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Product
13.56 MHz 1250, 2500 and 5000 Watt High-Reliability RF Plasma Generators
GHW Series
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The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield.
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Plasma Power Generators
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Advanced Energy’s field-proven, Precision PowerTM solutions offer extreme control, peerless arc handling, and cutting-edge match technology. Unlock new fabrication processes and benefit from our plasma power generators’ comprehensive capabilities.
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Product
2.5GS/s 16Bit 2GS Mem 8CH 16 Markers AWG
P2588D
Waveform Generator
The Proteus P2588D, is a 2.5GS/s, eight channel arbitrary waveform generator packaged in a 4U, half 19” dedicated chassis, offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P2588D offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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Product
PXIe-5433, 80 MHz Bandwidth, 2-Channel, 16-Bit PXI Waveform Generator
785118-01
Waveform Generator
The PXIe-5433 is an 80 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -12 V to +12 V and uses a fractional resampling method to precisely generate waveforms. The PXIe-5433 also features advanced synchronization and generation features like waveform scripting and streaming.
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Arbitrary Function Generator PXI Card
GX1200/GX1201
Waveform Generator
The GX1200 and GX1201 are high performance, single-channel PXI arbitrary waveform generators that combine a function generator, arbitrary waveform synthesizer, programmable sequencer, pulse generator, and modulation generator in one instrument. The GX1200 Series delivers all this at a lower cost than comparable benchtop or VXI-based instruments.
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Product
Waveform Generator, 20 MHz, 2 Channel
EDU33212A
Waveform Generator
The EDU33212A dual channel function / arbitrary waveform generator provides uncompromising performance for dual channel synchronized test output signals.
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Product
6GHz Four Channel Signal Generator
LS6084B
Signal Generator
The LS6084B is a 6GHz Four Channel RF Analog Signal Generator, offers industry leading performance, in an easy to use benchtop box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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PXIe-5451, 145 MHz, 16-Bit, 512 MB, PXI Waveform Generator
781204-02
Waveform Generator
PXIe, 145 MHz, 16-Bit, 512 MB, PXI Waveform Generator—The PXIe‑5451 is a 145 MHz, dual‐channel arbitrary waveform generator capable of generating user-definied waveforms, standard functions, and I/Q communications signals. It is an ideal instrument for including in systems for testing devices with I/Q inputs, or as the baseband component of an RF vector signal generator as wells as time-domain signals like envelope tracking. The PXIe‑5451 also features onboard signal processing (OSP) functions that include pulse shaping and interpolation filters, gain and offset control, and a numerically controlled oscillator (NCO) for frequency shifting. The PXIe‑5451 also features advanced synchronization and data streaming capabilities.
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PXI-5412, 20 MHz Bandwidth, 1-Channel, 14-Bit PXI Waveform Generator
779176-03
Waveform Generator
20 MHz Bandwidth, 1-Channel, 14-Bit PXI Waveform Generator - The PXI‑5412 is a 20 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -6 V to +6 V and uses direct digital synthesis (DDS) to precisely generate waveforms.
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Product
12GHz Single Channel Signal Generator
LS1291B
Signal Generator
The LS1291B is a 12GHz Single Channel RF Analog Signal Generator, offers industry leading performance, in an easy to use benchtop box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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3GHz 16-Channel Signal Generator 19" 3U Rack Module
LS30816R
Signal Generator
The LS30816R, 3GHz 16 channel RF Analog Signal Generator, offers industry leading performance, in a 3U, 19” space efficient, rack-mounted box. The LS30816R features 16 phase coherent channels, exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. With the highest channel density in the market the LS30816R offer the ideal solution for applications requiring high channel count at minimum space and cost.
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12GHz Single Channel Portable Signal Generator
LS1291P
Signal Generator
The LS1291P, 12GHz Single Channel RF Analog Signal Generator, offers industry leading performance, in a modern tablet like design that can be used as a benchtop or portable unit. The LS1291P features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS1291P was designed to offer excellent performance and meet today’s most demanding applications, whether in the lab or out in the field.
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Product
9GS/s 16Bit 8GS Mem 12CH 8 Markers RF AWG Desktop
P94812D
Waveform Generator
The desktop version of the Proteus arbitrary waveform generator series offers up to 12 channels in a 4U, half 19” dedicated chassis. The compact form size and small footprint save valuable bench space. So for synchronized, phase coherent, multi-channel applications such as quantum physics and radar applications the Proteus arbitrary waveform transceiver is an ideal, space efficient, and cost effective solution.
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Product
PXI-5421, 43 MHz Bandwidth, 16-Bit PXI Waveform Generator
778697-03
Waveform Generator
43 MHz Bandwidth, 16-Bit PXI Waveform Generator—The PXI‑5421 is a 43 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -6 V to +6 V and uses direct digital synthesis (DDS) to precisely generate waveforms. The PXI‑5421 also features advanced synchronization and data streaming capabilities.
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Product
2-Channel Arbitrary Waveform Generator
3156C
Waveform Generator
Racal Instruments™ 3156C Dual Channel Arbitrary Waveform Generator outputs 16-bit waveforms from 2 channels at up to 225 MS/s. 12-bit digital patterns may be output at rates up to 200 Mbits/s.
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12GHz Dual Channel Signal Generator 19" 1U Rack Module
LS1292R
Signal Generator
The LS1292R, 12GHz Dual Channel RF Analog Signal Generator, offers industry leading performance, in a 1U, 19” rack-mounted box. The LS1292R features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS1292R was designed to offer excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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Product
AT-1212, 14-Bit, 1.2 GS/s, 2-Channel Signal Generator Adapter Module for FlexRIO
782248-02
Signal Generator
The AT-1212 provides an analog output channel for signal generation. It also features single-ended, DC-coupled inputs. The AT-1212 is ideal for generating complex signals like digital modulations and RF stimuli for functional and performance tests. Each channel has a user-configurable sample rate, and data is written directly from the FPGA. To use the AT-1212, you must pair it with a compatible PXI FPGA Module for FlexRIO.
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16 Bit Waveform Generator
PA72G16400
Waveform Generator
The PA72G16400 is a 16-bit arbitrary waveform generator, capable of generating waveforms at speeds up to 400Msps. The high resolution and the high sample rate allows generating signals with very low quantization noise levels. An onboard offset voltage source allows generating offset signals while maintaining optimal utilization of the DAC’s digital range. With the 8MWord of memory, there is lots of room for uploading several different patterns, allowing switching patterns with minimal bus communication.
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UXG X-Series Agile Signal Generator, Modified Version
N5191A
Signal Generator
et closer to reality: simulate increasingly complex signal environments for radar, EW & antenna-test Test sooner & increase confidence in EW systems by generating signal simulations when you need them: the UXG is a scalable threat simulator Use pulse descriptor words (PDWs) to generate long pulse trains & individually control pulse characteristics Quickly characterize antennas over a wide frequency range with fast frequency tuning Performance without requiring an export license
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PXI-5404, 100 MHz Bandwidth, 1-Channel, 12-Bit PXI Waveform Generator
778577-02
Waveform Generator
The PXI‑5404 is a 100 MHz clock generator capable of generating clock and sine wave signals and some other standard functions. This clock generator can generate signals from -1 V to +1 V and uses direct … digital synthesis (DDS) to precisely generate waveforms.
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2.5GS/s 16Bit 2GS Mem 12CH Arbitrary Waveform Generators
P25812B
Waveform Generator
The Proteus P25812B, is a 2.5GS/s, twelve channel arbitrary waveform generator packaged in a 4U, 19” standalone box with a 9” touch screen and on board PC , offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P25812B offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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Product
Waveform Generator, 20 MHz, 1 Channel
EDU33211A
Waveform Generator
The EDU33211A single channel function / arbitrary waveform generator brings uncompromising performance to an entry-level function generator.
