Plasma Generators
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KEINOS™ 2 MHz 5 KW, 11 KW & 13 KW RF Plasma Generators
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The KEINOS™ 2MHz plasma generator builds on the solid, reliable attributes of the existing 2MHz design. KEINOS™ incorporates the latest technology from MKS to enable demanding applications of pulsing, fast impedance changes and shorter process steps. KEINOS™ can deliver up to 13kW of power, pulsing up to 50KHz, multiple set point pulsing, pulse shaping and MKS patented frequency tuning. KEINOS™ uses an integrated VI sensor for power accuracy and digital based control for fast response times.
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Product
13.56 MHz 1250, 2500 and 5000 Watt High-Reliability RF Plasma Generators
GHW Series
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The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield.
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RF Plasma Generators
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Choose from a broad range of RF plasma generators and access unique features for configuration, control, and application requirements. From various mounts and sizes to full digital control and plasma dynamic response, our RF generators can ignite your process innovation.
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Elite™ 13.56 MHz RF Plasma Generators
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The elite™ Series of RF plasma generators provides state-of-the art technology in a compact air-cooled package. The elite is designed with high speed closed loop control, a class E RF deck and a switching modulator for superior output performance. The elite design utilizes a single printed circuit board assembly for the full rack product virtually eliminating all internal wires and connectors and thereby providing the highest reliability available.
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High Power Microwave Plasma System
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The High Power Microwave Plasma System features the High Power Microwave Plasma Source, generator (with isolator) and auto-tuning system comprised of the Precision Power Detector and SmartMatch® unit. This comprehensive system delivers a high concentration of radicals with low electron temperatures for the highest dissociation and lowest recombination rates.
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Plasma Power Generators
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Advanced Energy’s field-proven, Precision PowerTM solutions offer extreme control, peerless arc handling, and cutting-edge match technology. Unlock new fabrication processes and benefit from our plasma power generators’ comprehensive capabilities.
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Remote Plasma Sources
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Semiconductor and Electronic Thin Film applications use plasma sources to generate low-energy ions and radicals to react with material surfaces and chamber walls to remove contaminants and act as a precursor to aid in material deposition. MKS provides multiple options for radical generation including Toroidal and Microwave based Remote Plasma Sources supporting Fluorine, NF3, oxygen, nitrogen and hydrogen process chemistries.
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In Situ Diagnostics
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For researchers working on ultra thin films and novel interfaces, Neocera offers insitu, real-time process control and diagnostic tools such as high-pressure RHEED, Low Angle X-ray Spectroscopy (LAXS) and Ion Energy Spectroscopy (IES). RHEED provides exceptional growth control via RHEED intensity oscillations and the Structural data via diffraction. LAXS is a complimentary to RHEED and provides real-time Compositional information. IES provides energetics of the laser generated plasma plume which is directly responsible for obtaining high quality films and interfaces.
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Low Frequency RF Broadband Power Sources
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Class A has RF power source, ideal for Industrial /Scientific / Medical applications. Class AS is a robust source of RF power for ultrasonic, laser modulation, RFI/EMI, plasma generation, general laboratory and industrial applications.
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Product
GHW Series 13.56 MHz, 1.25, 2.5, And 5.0 KW High-Reliability RF Plasma Generators
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The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield. They are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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Product
20 Bit / 2 MS/s Arbitrary Waveform Generator
AWG20
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The AWG20 is a 20 bit Arbitrary Waveform Generator for medium-speed / high resolution waveform generation. The module combines an excellent dynamic performance with a very high DC accuracy.
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Product
9GS/s 16Bit 8GS Mem 8CH 8 Markers RF AWG Desktop
P9488D
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The desktop version of the Proteus arbitrary waveform generator series offers up to 12 channels in a 4U, half 19” dedicated chassis. The compact form size and small footprint save valuable bench space. So for synchronized, phase coherent, multi-channel applications such as quantum physics and radar applications the Proteus arbitrary waveform transceiver is an ideal, space efficient and cost effective solution.
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PXIe-5423, 40 MHz Bandwidth, 1-Channel, 16-Bit PXI Waveform Generator
785115-01
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The PXIe-5423 is a 40 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -12 V to +12 V and uses a fractional resampling method to precisely generate waveforms. The PXIe-5423 also features advanced synchronization and generation features like waveform scripting and streaming.
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PXIe Arbitrary Waveform Generator, 500 MSa/s, 16 bit, 200 MHz
M3201A
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The M3201A PXIe arbitrary waveform generator is ideal for general purpose AWG automated test requirements. It offers high channel density with high-quality output with low phase noise. The optional real-time sequencing, intermodulation synchronization, and graphical FPGA programming software tools expand its capability to enable a number of solutions including envelope tracking (ET) and DPD (part of PA/FEM reference solution), MIMO, baseband electronics design, wireless device manufacturing, ATE, beamforming and other multi-channel coherent signal generation and multi-channel signal generation.
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PXIe-5451, 145 MHz, 16-Bit, 512 MB, PXI Waveform Generator
781204-02
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PXIe, 145 MHz, 16-Bit, 512 MB, PXI Waveform Generator—The PXIe‑5451 is a 145 MHz, dual‐channel arbitrary waveform generator capable of generating user-definied waveforms, standard functions, and I/Q communications signals. It is an ideal instrument for including in systems for testing devices with I/Q inputs, or as the baseband component of an RF vector signal generator as wells as time-domain signals like envelope tracking. The PXIe‑5451 also features onboard signal processing (OSP) functions that include pulse shaping and interpolation filters, gain and offset control, and a numerically controlled oscillator (NCO) for frequency shifting. The PXIe‑5451 also features advanced synchronization and data streaming capabilities.
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9GS/s 8Bit, 4GS Mem 2CH 8 Markers AWG
P9082D
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The Proteus P9082D, is a 9GS/s, dual channel arbitrary waveform generator packaged in a 4U, half 19” dedicated chassis, offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P9082D offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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20GHz Four Channel MW Benchtop Signal Generator
LSX2094B
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The LSX2094B is a 20GHz Four Channel Microwave Signal Generator, offers industry leading performance, in an easy to use benchtop box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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1.25GS/s 16Bit 1GS Mem 12CH Arbitrary Waveform Generator
P12812B
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The Proteus P12812B, is a 1.25GS/s, twelve channel arbitrary waveform generator packaged in a 4U, 19” standalone box with a 9” touch screen and on board PC , offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P12812B offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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Product
6GHz Single Channel Portable Signal Generator
LS6081P
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The LS6081P, 6GHz Single Channel RF Analog Signal Generator, offers industry leading performance, in a modern tablet like design that can be used as a benchtop or portable unit. The LS6081P features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS6081P was designed to offer excellent performance and meet today’s most demanding applications, whether in the lab or out in the field.
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Waveform Generator, 20 MHz, 1-Channel, with Arb
33511B
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Keysight 33500B Series waveform generators with exclusive Trueform signal generation technology offer more capability, fidelity and flexibility than previous generation DDS generators. Easily generate the full range of signals you need to your devices with confidence the signal generator is outputting the signals you expect.
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PXI-5404, 100 MHz Bandwidth, 1-Channel, 12-Bit PXI Waveform Generator
778577-02
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The PXI‑5404 is a 100 MHz clock generator capable of generating clock and sine wave signals and some other standard functions. This clock generator can generate signals from -1 V to +1 V and uses direct … digital synthesis (DDS) to precisely generate waveforms.
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3GHz Single Channel Signal Generator 19" 1U Rack Module
LS3081R
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The LS3081R, 3GHz Single Channel RF Analog Signal Generator, offers industry leading performance, in a 1U, 19” rack-mounted box. The LS3081R features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS3081R was designed to offer excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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Product
14-Bit Waveform Generator
PA72G14180
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The PA72G14180 is a 14-bit arbitrary waveform generator, capable of generating waveforms at speeds up to 180Msps. An onboard offset voltage source allows generating offset signals while maintaining optimal utilization of the DAC’s digital range. With the 64MWord of memory, there is lots of room for uploading long complex waveforms. Also uploading of many different patterns is possible, allowing switching patterns with minimal bus communication.
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9GS/s 8Bit, 4GS Mem 6CH 24 Markers AWG
P9086D
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The Proteus P9086D, is a 9GS/s, six channel arbitrary waveform generator packaged in a 4U, half 19” dedicated chassis, offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P9086D offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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Product
Arbitrary Waveform Generator PCI Card
GC1300
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The GC1300 is a single-channel PCI-based Arbitrary Waveform Generator. It is a high performance waveform generator that combines many powerful functions in one small package. Supplied free with the instrument is Arbconnection software, which is used for controlling the GC1300 and for generating, editing and downloading waveforms from a remote computer.
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Product
40GHz Single Channel MW Signal Generator 19" 1U Rack
LSX4091R
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The LSX4091R is a 40GHz Single Channel Microwave Signal Generator, offers industry leading performance, in a 1U, 19” rack-mounted box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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Product
12GHz Single Channel Signal Generator
LS1291B
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The LS1291B is a 12GHz Single Channel RF Analog Signal Generator, offers industry leading performance, in an easy to use benchtop box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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PXI-5402, 14/16-Bit, 20/40 MHz Arbitrary Function Generator
779655-01
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20 MHz Bandwidth, 14-Bit PXI Waveform Generator—The PXI‑5402 is a 20 MHz function generator capable of generating standard functions including sine, square, triangle, and ramp as well as other signals like psuedorandom noise and DC signals. This function generator can generate signals from -5 V to +5 V and uses direct digital synthesis (DDS) to precisely generate waveforms.
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PXI-5651, 3.3 GHz RF Signal Generator
779670-01
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3.3 GHz PXI RF Analog Signal Generator—The PXI‑5651 features continuous-wave generation capabilities with FM, 2‑FSK, or OOK modulation. It uses direct digital synthesis (DDS) for high-resolution frequency hopping or phase-continuous sweeping for fixture and device characterization applications. The PXI‑5651 is ideal for clocking nonstandard sample rates, such as WCDMA signals at baseband or intermediate frequency (IF). With these versatile signal generators, you can perform analog and digital modulation through the onboard DDS circuit, which gives you frequency modulation and frequency-shift keying for applications such as bit error rate test, antenna testing, or even keyless entry. You can also perform amplitude modulation using on-off keying.
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9GS/s 16Bit 8GS Mem 12CH 8 Markers RF AWG Desktop
P94812D
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The desktop version of the Proteus arbitrary waveform generator series offers up to 12 channels in a 4U, half 19” dedicated chassis. The compact form size and small footprint save valuable bench space. So for synchronized, phase coherent, multi-channel applications such as quantum physics and radar applications the Proteus arbitrary waveform transceiver is an ideal, space efficient, and cost effective solution.
