Plasma Generators
-
Product
RF Plasma Generators
-
Choose from a broad range of RF plasma generators and access unique features for configuration, control, and application requirements. From various mounts and sizes to full digital control and plasma dynamic response, our RF generators can ignite your process innovation.
-
Product
13.56 MHz 1250, 2500 and 5000 Watt High-Reliability RF Plasma Generators
GHW Series
-
The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield.
-
Product
Plasma Power Generators
-
Advanced Energy’s field-proven, Precision PowerTM solutions offer extreme control, peerless arc handling, and cutting-edge match technology. Unlock new fabrication processes and benefit from our plasma power generators’ comprehensive capabilities.
-
Product
KEINOS™ 2 MHz 5 KW, 11 KW & 13 KW RF Plasma Generators
-
The KEINOS™ 2MHz plasma generator builds on the solid, reliable attributes of the existing 2MHz design. KEINOS™ incorporates the latest technology from MKS to enable demanding applications of pulsing, fast impedance changes and shorter process steps. KEINOS™ can deliver up to 13kW of power, pulsing up to 50KHz, multiple set point pulsing, pulse shaping and MKS patented frequency tuning. KEINOS™ uses an integrated VI sensor for power accuracy and digital based control for fast response times.
-
Product
Elite™ 13.56 MHz RF Plasma Generators
-
The elite™ Series of RF plasma generators provides state-of-the art technology in a compact air-cooled package. The elite is designed with high speed closed loop control, a class E RF deck and a switching modulator for superior output performance. The elite design utilizes a single printed circuit board assembly for the full rack product virtually eliminating all internal wires and connectors and thereby providing the highest reliability available.
-
Product
Low Frequency RF Broadband Power Sources
-
Class A has RF power source, ideal for Industrial /Scientific / Medical applications. Class AS is a robust source of RF power for ultrasonic, laser modulation, RFI/EMI, plasma generation, general laboratory and industrial applications.
-
Product
GHW Series 13.56 MHz, 1.25, 2.5, And 5.0 KW High-Reliability RF Plasma Generators
-
The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield. They are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
-
Product
High Power Microwave Plasma System
-
The High Power Microwave Plasma System features the High Power Microwave Plasma Source, generator (with isolator) and auto-tuning system comprised of the Precision Power Detector and SmartMatch® unit. This comprehensive system delivers a high concentration of radicals with low electron temperatures for the highest dissociation and lowest recombination rates.
-
Product
Remote Plasma Sources
-
Semiconductor and Electronic Thin Film applications use plasma sources to generate low-energy ions and radicals to react with material surfaces and chamber walls to remove contaminants and act as a precursor to aid in material deposition. MKS provides multiple options for radical generation including Toroidal and Microwave based Remote Plasma Sources supporting Fluorine, NF3, oxygen, nitrogen and hydrogen process chemistries.
-
Product
In Situ Diagnostics
-
For researchers working on ultra thin films and novel interfaces, Neocera offers insitu, real-time process control and diagnostic tools such as high-pressure RHEED, Low Angle X-ray Spectroscopy (LAXS) and Ion Energy Spectroscopy (IES). RHEED provides exceptional growth control via RHEED intensity oscillations and the Structural data via diffraction. LAXS is a complimentary to RHEED and provides real-time Compositional information. IES provides energetics of the laser generated plasma plume which is directly responsible for obtaining high quality films and interfaces.
-
Product
9GS/s 8Bit, 4GS Mem 6CH 24 Markers AWG
P9086D
Waveform Generator
The Proteus P9086D, is a 9GS/s, six channel arbitrary waveform generator packaged in a 4U, half 19” dedicated chassis, offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P9086D offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
-
Product
2.5GS/s 16Bit 2GS Mem 2CH 8 Markers AWG
P2582D
Waveform Generator
The Proteus P2582D, is a 2.5GS/s, dual channel arbitrary waveform generator packaged in a 4U, half 19” dedicated chassis, offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P2582D offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
-
Product
40GHz Four Channel MW Signal Generator 19" 1U Rack
LSX4094R
Signal Generator
The Lucid-X is a small footprint modular microwave signal generator that is available in multiple form factors, including Desktop, PXIe module, benchtop, rackmount, and portable. It has been designed to provide low phase noise, with a frequency range all the way up to 40GHz.
-
Product
PCI-5421, 100 MS/s, 16-Bit Waveform Generator Device
778692-02
Waveform Generator
The PCI‑5421 can generate user-defined, arbitrary waveforms and standard functions, including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -6 V to +6 V and uses direct digital synthesis (DDS) to precisely generate waveforms. The PCI‑5421 also features advanced synchronization and data streaming capabilities.
-
Product
9GS/s 16Bit 8GS Mem 8CH 16 Markers RF AWG Benchtop
P9488B
Waveform Generator
The benchtop version of the Proteus arbitrary waveform generator series offers up to 12 channels in a 4U, 19” benchtop box. With a 9” touch display and on-board PC the benchtop platform enables users to program the instrument without the need of an external PC. Users can program the instrument from the onboard PC using various programming environments such as MATLAB, LabView, Python, and more. So for synchronized, phase coherent, multi-channel applications such as quantum physics and radar applications the Proteus arbitrary waveform transceiver is an ideal, high performance, and cost effective solution.
-
Product
Arbitrary/Function Generator,2 Ch,8-DIG ch, 150 MHz,16 bit,128Mpts/Ch,6 Vpp output, Wave Sequencing
T3AWG2152-D
Function Generator
Arbitrary/Function Generator,2 Ch,8-DIG ch, 150 MHz,16 bit,128Mpts/Ch,6 Vpp output, Wave Sequencing.
-
Product
Arbitrary/Function Generator,2 Ch,150 MHz,16 bit,128Mpts/Ch,6 Vpp output, Wave Sequencing
T3AWG2152
Function Generator
Arbitrary/Function Generator,2 Ch,150 MHz,16 bit,128Mpts/Ch,6 Vpp output, Wave Sequencing.
-
Product
UXG X-Series Agile Signal Generator, 10 MHz to 40 GHz
N5193A
Signal Generator
Get closer to reality: simulate increasingly complex signal environments for radar, EW & antenna-test Test sooner & increase confidence in EW systems by generating signal simulations when you need them: the UXG is a scalable threat simulator Use pulse descriptor words (PDWs) to generate long pulse trains & individually control pulse characteristics Accurately simulate multi-threat environments: 180-ns PDW update rate, chirps 10 to 25% of carrier frequency, pulses as narrow as 10 ns
-
Product
40GHz Single Channel MW Signal Generator 19" 1U Rack
LSX4091R
Signal Generator
The LSX4091R is a 40GHz Single Channel Microwave Signal Generator, offers industry leading performance, in a 1U, 19” rack-mounted box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
-
Product
20GHz Dual Channel MW Benchtop Signal Generator
LSX2092B
Signal Generator
The LSX2092B is a 20GHz Dual Channel Microwave Signal Generator, offers industry leading performance, in an easy to use benchtop box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
-
Product
3GHz Four Channel Signal Generator
LS3084B
Signal Generator
The LS3084B is a 3GHz Four Channel RF Analog Signal Generator, offers industry leading performance, in an easy to use benchtop box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
-
Product
PXI/PXIe Arbitrary Generators
Waveform Generator
The arbitrary waveform generators of the PXA72xx family are characterized by a resolution of 16 bits with a maximum sample rate of 200 MS per second. The devices can also be used to directly output voltages of up to 30 V (or ±15 V).
-
Product
PXI-5402, 14/16-Bit, 20/40 MHz Arbitrary Function Generator
779655-01
Waveform Generator
20 MHz Bandwidth, 14-Bit PXI Waveform Generator—The PXI‑5402 is a 20 MHz function generator capable of generating standard functions including sine, square, triangle, and ramp as well as other signals like psuedorandom noise and DC signals. This function generator can generate signals from -5 V to +5 V and uses direct digital synthesis (DDS) to precisely generate waveforms.
-
Product
PXIe Multi-Channel Function Generator Module, 32-Channel
43-625-001
Function Generator
The 41-625-001 (PXI) and 43-625-001 (PXIe) are function generator modules that provide 32 channels in a single PXI/PXIe slot. They can generate sine waves to 300 kHz with 5.76 mHz frequency resolution referenced to the 10 MHz PXI clock. The output voltage range is up to +/-25 V in a 16-bit resolution. It also support PXI trigger functions allowing events from other instruments to initiate waveform generation or sweeps.
-
Product
VXI Single/Dual Channel Arbitrary Waveform Generator
3100M
Waveform Generator
The Astronics Test Systems 3100M Waveform Synthesizer Series combines 300 MS/s waveform generation performance, versatility, and compact size into a single-slot VXIbus format.The 3100M is a greatly improved version of a field-proven instrument ideal for VXI test stimulus generation. It replaces one or two of the popular 3152A Precision PLL Waveform Synthesizers, which are standard on many military and commercial test platforms.
-
Product
PXI-5404, 100 MHz Bandwidth, 1-Channel, 12-Bit PXI Waveform Generator
778577-02
Waveform Generator
The PXI‑5404 is a 100 MHz clock generator capable of generating clock and sine wave signals and some other standard functions. This clock generator can generate signals from -1 V to +1 V and uses direct … digital synthesis (DDS) to precisely generate waveforms.
-
Product
PXIe-5442, 43 MHz Bandwidth, 16-Bit Onboard Signal Processing, 32 MB, PXI Waveform Generator
780109-01
Waveform Generator
PXIe, 43 MHz Bandwidth, 16-Bit Onboard Signal Processing, 32 MB, PXI Waveform Generator—The PXIe‑5442 is a 43 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms, standard functions including sine, square, triangle, and ramp, as well as signals that require onboard signal processing. Some of these signal processing operations include FIR and CIC interpolation filters, digtal prefilter gain, numerically-controlled oscillator, and I/Q mixing for quadrature digital upcoversion. The PXIe‑5442 also features advanced synchronization and data streaming capabilities.
-
Product
Arbitrary Function Generator PXI Card
GX1200/GX1201
Waveform Generator
The GX1200 and GX1201 are high performance, single-channel PXI arbitrary waveform generators that combine a function generator, arbitrary waveform synthesizer, programmable sequencer, pulse generator, and modulation generator in one instrument. The GX1200 Series delivers all this at a lower cost than comparable benchtop or VXI-based instruments.
-
Product
PCI-5412, 100 MS/s, 14-Bit Waveform Generator Device
779177-02
Waveform Generator
The PCI‑5412 can generate user-defined, arbitrary waveforms and standard functions, including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -6 V to +6 V and uses direct digital synthesis (DDS) to precisely generate waveforms.
-
Product
50MS/s Dual-Channel Arbitrary Waveform Generator
WW5062
Waveform Generator
Model WW5062 represents the next generation of products in the field of function, pulse and arbitrary waveform generators. This instrument is superior and far more versatile than any existing equivalent whether it is an analog or digital product. As a waveform source, this model can replace analog generators in almost every application.
