Plasma Generators
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RF Plasma Generators
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Choose from a broad range of RF plasma generators and access unique features for configuration, control, and application requirements. From various mounts and sizes to full digital control and plasma dynamic response, our RF generators can ignite your process innovation.
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13.56 MHz 1250, 2500 and 5000 Watt High-Reliability RF Plasma Generators
GHW Series
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The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield.
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KEINOS™ 2 MHz 5 KW, 11 KW & 13 KW RF Plasma Generators
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The KEINOS™ 2MHz plasma generator builds on the solid, reliable attributes of the existing 2MHz design. KEINOS™ incorporates the latest technology from MKS to enable demanding applications of pulsing, fast impedance changes and shorter process steps. KEINOS™ can deliver up to 13kW of power, pulsing up to 50KHz, multiple set point pulsing, pulse shaping and MKS patented frequency tuning. KEINOS™ uses an integrated VI sensor for power accuracy and digital based control for fast response times.
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GHW Series 13.56 MHz, 1.25, 2.5, And 5.0 KW High-Reliability RF Plasma Generators
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The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield. They are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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Remote Plasma Sources
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Semiconductor and Electronic Thin Film applications use plasma sources to generate low-energy ions and radicals to react with material surfaces and chamber walls to remove contaminants and act as a precursor to aid in material deposition. MKS provides multiple options for radical generation including Toroidal and Microwave based Remote Plasma Sources supporting Fluorine, NF3, oxygen, nitrogen and hydrogen process chemistries.
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Plasma Power Generators
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Advanced Energy’s field-proven, Precision PowerTM solutions offer extreme control, peerless arc handling, and cutting-edge match technology. Unlock new fabrication processes and benefit from our plasma power generators’ comprehensive capabilities.
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Elite™ 13.56 MHz RF Plasma Generators
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The elite™ Series of RF plasma generators provides state-of-the art technology in a compact air-cooled package. The elite is designed with high speed closed loop control, a class E RF deck and a switching modulator for superior output performance. The elite design utilizes a single printed circuit board assembly for the full rack product virtually eliminating all internal wires and connectors and thereby providing the highest reliability available.
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High Power Microwave Plasma System
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The High Power Microwave Plasma System features the High Power Microwave Plasma Source, generator (with isolator) and auto-tuning system comprised of the Precision Power Detector and SmartMatch® unit. This comprehensive system delivers a high concentration of radicals with low electron temperatures for the highest dissociation and lowest recombination rates.
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In Situ Diagnostics
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For researchers working on ultra thin films and novel interfaces, Neocera offers insitu, real-time process control and diagnostic tools such as high-pressure RHEED, Low Angle X-ray Spectroscopy (LAXS) and Ion Energy Spectroscopy (IES). RHEED provides exceptional growth control via RHEED intensity oscillations and the Structural data via diffraction. LAXS is a complimentary to RHEED and provides real-time Compositional information. IES provides energetics of the laser generated plasma plume which is directly responsible for obtaining high quality films and interfaces.
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Low Frequency RF Broadband Power Sources
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Class A has RF power source, ideal for Industrial /Scientific / Medical applications. Class AS is a robust source of RF power for ultrasonic, laser modulation, RFI/EMI, plasma generation, general laboratory and industrial applications.
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PXI-5651, 3.3 GHz RF Signal Generator
779670-01
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3.3 GHz PXI RF Analog Signal Generator—The PXI‑5651 features continuous-wave generation capabilities with FM, 2‑FSK, or OOK modulation. It uses direct digital synthesis (DDS) for high-resolution frequency hopping or phase-continuous sweeping for fixture and device characterization applications. The PXI‑5651 is ideal for clocking nonstandard sample rates, such as WCDMA signals at baseband or intermediate frequency (IF). With these versatile signal generators, you can perform analog and digital modulation through the onboard DDS circuit, which gives you frequency modulation and frequency-shift keying for applications such as bit error rate test, antenna testing, or even keyless entry. You can also perform amplitude modulation using on-off keying.
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MXG X-Series Microwave Analog Signal Generator, 9 kHz to 40 GHz
N5183B
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Get a fast, compact (2U) alternative to the PSG in the lab, depot or fieldAddress demanding tests of radar modules & systems with near-PSG levels of spectral purityCompensate for system loss & drive high-power amplifiers: +19 dBm output power, -55 dBc harmonics & -68 dBc spurious @ 20 GHzReduce calibration time with switching speed 600 sSimulate narrowband chirps & radar antenna scans with up to five internal function generators that can be used with AM, FM, OM pulse modulation
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PXIe CW Source, 1 MHz to 3 GHz or 6 GHz
M9380A
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Save floor space with a compact, modular analog signal generator Provides Keysight quality and performance for local oscillator (LO) substitution, interference and component test Minimize need for external amplification with output power of +18 dBm across the frequency range Reduce test time with easy integration into your high-speed automated test system
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Waveform Generator, 30 MHz, 2-Channel with Arb
33522B
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Keysight 33500B Series waveform generators with exclusive Trueform signal generation technology offer more capability, fidelity and flexibility than previous generation DDS generators. Easily generate the full range of signals you need to your devices with confidence the signal generator is outputting the signals you expect.
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1.25GS/s 16Bit 1GS Mem 2CH 4 Markers Arbitrary Waveform Generator
P1282B
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The Proteus P1282B, is a 1.25GS/s, dual channel arbitrary waveform generator packaged in a 4U, 19” standalone box with a 9” touch screen and on board PC , offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P1282B offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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PXI-5421, 43 MHz Bandwidth, 16-Bit PXI Waveform Generator
778697-04
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43 MHz Bandwidth, 16-Bit PXI Waveform Generator—The PXI‑5421 is a 43 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -6 V to +6 V and uses direct digital synthesis (DDS) to precisely generate waveforms. The PXI‑5421 also features advanced synchronization and data streaming capabilities.
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EXG X-Series Microwave Analog Signal Generator, 9 kHz to 40 GHz
N5173B
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Balance budget & performance to address parametric testing of microwave components & receiversPerform LO up conversion for microwave backhaul links or CW blocking for receiver testingMaximize test throughput with 600-s frequency switchingCharacterize microwave filters & amplifiers with the best combination of output power, low harmonics & full step attenuationUse as a high-stability system reference: the standard high-performance OCXO has an aging rate of 5x10-10 parts/day
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40GHz MW Benchtop Signal Generator
LSX4094B
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The LSX4094B is a 40GHz Four Channel Microwave Signal Generator, offers industry leading performance, in an easy to use benchtop box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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180/400 MS/s Dual Channel PXI Express Arbitrary Waveform Generator
PXIe-1802
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The Astronics Test Systems PXIe-1802 is a 2-channel Arbitrary Waveform Generator (AWG). Occupying just one PXI Express periphal slot or hybrid slot, this AWG offers the best speed and performance available for output frequencies up to 125 MHz
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PXIe-5451, 145 MHz, 16-Bit, 128 MB, PXI Waveform Generator
781204-01
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PXIe, 145 MHz, 16-Bit, 128 MB, PXI Waveform Generator—The PXIe‑5451 is a 145 MHz, dual‐channel arbitrary waveform generator capable of generating user-definied waveforms, standard functions, and I/Q communications signals. It is an ideal instrument for including in systems for testing devices with I/Q inputs, or as the baseband component of an RF vector signal generator as wells as time-domain signals like envelope tracking. The PXIe‑5451 also features onboard signal processing (OSP) functions that include pulse shaping and interpolation filters, gain and offset control, and a numerically controlled oscillator (NCO) for frequency shifting. The PXIe‑5451 also features advanced synchronization and data streaming capabilities.
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12GHz RF Analog Signal Generator Module
LS1291D
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The LS1291D, 12GHz Single Channel RF Analog Signal Generator, offers industry leading performance, combined with a compact small footprint form factor. The LS1291D features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS1291D is designed to meet today’s most demanding specifications, needed from the R&D benches to the production lines.
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PXIe-5442, 43 MHz Bandwidth, 16-Bit Onboard Signal Processing, 256 MB, PXI Waveform Generator
780109-02
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PXIe, 43 MHz Bandwidth, 16-Bit Onboard Signal Processing, 256 MB, PXI Waveform Generator—The PXIe‑5442 is a 43 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms, standard functions including sine, square, triangle, and ramp, as well as signals that require onboard signal processing. Some of these signal processing operations include FIR and CIC interpolation filters, digtal prefilter gain, numerically-controlled oscillator, and I/Q mixing for quadrature digital upcoversion. The PXIe‑5442 also features advanced synchronization and data streaming capabilities.
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PCI-5421, 100 MS/s, 16-Bit Waveform Generator Device
778692-03
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The PCI‑5421 can generate user-defined, arbitrary waveforms and standard functions, including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -6 V to +6 V and uses direct digital synthesis (DDS) to precisely generate waveforms. The PCI‑5421 also features advanced synchronization and data streaming capabilities.
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USB Modular Function Generator
U2761A
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Keysight U2761A is a 20 MHz function generator that offers 10 standard waveforms plus pulse and arbitrary waveforms generation capabilities.
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3GHz Dual Channel Signal Generator 19" 1U Rack Module
LS3082R
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The LS3082R, 3GHz dual channel RF Analog Signal Generator, offers industry leading performance, in a 1U, 19” space efficient, rack-mounted box. The LS3082R features two phase coherent channels, exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS3082R was designed to offer excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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Dual Channel 100 MHz Pulse Generator
PXIe-1209
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The Astronics Test Systems PXIe-1209 PXI is a high-performance, 2-channel, 100 MHz Pulse Generator. Occupying a single PXI Express peripheral slot or hybrid slot, the PXIe-1209 provides dual independent pulse generation with fullcontrol of all timing parameters with extremely high resolution.
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PXI-5422, 80 MHz Bandwidth, 16-Bit PXI Waveform Generator
779087-01
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80 MHz Bandwidth, 16-Bit PXI Waveform Generator - The PXI‑5422 is a 80 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -6 V to +6 V and uses direct digital synthesis (DDS) to precisely generate waveforms. The PXI‑5422 also features advanced synchronization and data streaming capabilities.
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9GS/s 16Bit 8GS Mem 8CH 8 Markers RF AWG Desktop
P9488D
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The desktop version of the Proteus arbitrary waveform generator series offers up to 12 channels in a 4U, half 19” dedicated chassis. The compact form size and small footprint save valuable bench space. So for synchronized, phase coherent, multi-channel applications such as quantum physics and radar applications the Proteus arbitrary waveform transceiver is an ideal, space efficient and cost effective solution.
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PXI-5404, 100 MHz Bandwidth, 1-Channel, 12-Bit PXI Waveform Generator
778577-02
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The PXI‑5404 is a 100 MHz clock generator capable of generating clock and sine wave signals and some other standard functions. This clock generator can generate signals from -1 V to +1 V and uses direct … digital synthesis (DDS) to precisely generate waveforms.
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PXI-5421, 43 MHz Bandwidth, 1-Channel, 16-Bit PXI Waveform Generator
778697-01
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43 MHz Bandwidth, 1-Channel, 16-Bit PXI Waveform Generator - The PXI‑5421 is a 43 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -6 V to +6 V and uses direct digital synthesis (DDS) to precisely generate waveforms. The PXI‑5421 also features advanced synchronization and data streaming capabilities.
