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Plasma Generators
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2 MHz RF Plasma Generators
NOVA® Series
The NOVA ; RF Plasma Generators are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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RF Plasma Generators & Amplifiers
100 W to 2400 W 13.56 MHz Analog/Digital, RS-232, USB interfaces Low Harmonic Distortion Automatic and Manual Gain Control High Speed Pulsing (Bursting) controls Compatible with T&C''''s Matching Networks GUI Software (complete PC control) Includes all essential RF power/communication cables and mounting brackets Air cooled (Air & Water 1200 W +) Half rack mount or stand alone versions Ideal for: Industrial, Scientific, and Medical Applications
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In Situ Diagnostics
For researchers working on ultra thin films and novel interfaces, Neocera offers insitu, real-time process control and diagnostic tools such as high-pressure RHEED, Low Angle X-ray Spectroscopy (LAXS) and Ion Energy Spectroscopy (IES). RHEED provides exceptional growth control via RHEED intensity oscillations and the Structural data via diffraction. LAXS is a complimentary to RHEED and provides real-time Compositional information. IES provides energetics of the laser generated plasma plume which is directly responsible for obtaining high quality films and interfaces.
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RF Plasma Generators
Choose from a broad range of RF plasma generators and access unique features for configuration, control, and application requirements. From various mounts and sizes to full digital control and plasma dynamic response, our RF generators can ignite your process innovation.
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Remote Plasma Sources
Semiconductor and Electronic Thin Film applications use plasma sources to generate low-energy ions and radicals to react with material surfaces and chamber walls to remove contaminants and act as a precursor to aid in material deposition. MKS provides multiple options for radical generation including Toroidal and Microwave based Remote Plasma Sources supporting Fluorine, NF3, oxygen, nitrogen and hydrogen process chemistries.
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13.56 MHz 1250, 2500 and 5000 Watt High-Reliability RF Plasma Generators
GHW Series
The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield.
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Elite™ 13.56 MHz RF Plasma Generators
The elite™ Series of RF plasma generators provides state-of-the art technology in a compact air-cooled package. The elite is designed with high speed closed loop control, a class E RF deck and a switching modulator for superior output performance. The elite design utilizes a single printed circuit board assembly for the full rack product virtually eliminating all internal wires and connectors and thereby providing the highest reliability available.
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High Power Microwave Plasma System
The High Power Microwave Plasma System features the High Power Microwave Plasma Source, generator (with isolator) and auto-tuning system comprised of the Precision Power Detector and SmartMatch® unit. This comprehensive system delivers a high concentration of radicals with low electron temperatures for the highest dissociation and lowest recombination rates.
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Plasma Power Generators
Advanced Energy’s field-proven, Precision PowerTM solutions offer extreme control, peerless arc handling, and cutting-edge match technology. Unlock new fabrication processes and benefit from our plasma power generators’ comprehensive capabilities.
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High Density Plasma Etching System for 200mm substrates
Model DRIE-1200-LL-ICP
Single process chamber for high rate plasma etching of 200mm wafers. Loadlocked. Stainless steel construction. Capabilities of smaller, multiple wafer throughput. Substrate materials include (but are not limited to) silicon, silicon oxynitrides, SiC, SiGe, Aluminum, and III-V compounds including GaAs, GaN, GaP, and InP. Stable plasma generation capabilities to below 1 mTorr. Five, Six, or Eight gas mass flow controllers are standard. Expanded or reduced numbers are available upon request.
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GHW Series 13.56 MHz, 1.25, 2.5, And 5.0 KW High-Reliability RF Plasma Generators
The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield. They are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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KEINOS™ 2 MHz 5 KW, 11 KW & 13 KW RF Plasma Generators
The KEINOS™ 2MHz plasma generator builds on the solid, reliable attributes of the existing 2MHz design. KEINOS™ incorporates the latest technology from MKS to enable demanding applications of pulsing, fast impedance changes and shorter process steps. KEINOS™ can deliver up to 13kW of power, pulsing up to 50KHz, multiple set point pulsing, pulse shaping and MKS patented frequency tuning. KEINOS™ uses an integrated VI sensor for power accuracy and digital based control for fast response times.
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Astronics PXIe-1209 , 2-Channel, 100 MHz PXI Pulse Generator
785033-01
2-Channel, 100 MHz PXI Pulse Generator - The Astronics PXIe-1209 provides dual independent pulse generation with full control of all timing parameters with extremely high resolution. Both channels are fully independent, and you can configure pulse delay, double pulse spacing, pulse width, and period. Each channel offers front panel trigger inputs with software-programmable thresholds and PXI backplane triggering.
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Video Pattern Signal Generator
Model A223800/01/02/03/04
Support 8K Super Hi-Vision (7680x4320/8192x4320)Independent graphics core for 8K Super Hi-Vision pattern with less than 200 msec. switch timeUp to 4 signal modules per unitUp to 4 resolution and pattern outputs.7 inch 1024x 600 high-resolution touch panel, GUI interfaceBMP file format supportUSB 3.0 data accessGigabit Ethernet high-speed network interfaceHDMI 2.0a signal module (Optional) - 8K x 4K 60 Hz (4 HDMI port) - 4K x 2K 60 Hz (1 HDMI port) - Pixel rate up to 600MHz (6Gbps TMDS rate) - RGB 4:4:4 / YCbCr 4:4:4 or 4:2:2 or 4:2:0 - HDCP 2.2 / 1.4 - Wide color gamut (ITU-R BT.2020/DCI-P3) - HDR (High Dynamic Range) Testing (HDR infoframe & metadata / EOTF) - SCDC (status & control data channel) Reader
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Signal Generator Adapter Module For FlexRIO
Signal Generator Adapter Modules for FlexRIO feature either high or low‐speed analog output and can be paired with a PXI FPGA Module for FlexRIO or the Controller for FlexRIO for custom signal generation. Whether you need to dynamically generate waveforms on the FPGA or stream them across the PXI backplane, these adapter modules are well suited for applications in communications, hardware‐in‐the‐loop (HIL) test, and scientific instrumentation.
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AT-1212, 14-Bit, 1.2 GS/s, 2-Channel Signal Generator Adapter Module for FlexRIO
782248-02
The AT-1212 provides an analog output channel for signal generation. It also features single-ended, DC-coupled inputs. The AT-1212 is ideal for generating complex signals like digital modulations and RF stimuli for functional and performance tests. Each channel has a user-configurable sample rate, and data is written directly from the FPGA. To use the AT-1212, you must pair it with a compatible PXI FPGA Module for FlexRIO.
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200MS/s Four-Channel Arbitrary Waveform Generator
WW2074
The WW2074 offer a 200 MS/s four-channel universal waveform synthesizer. Each is built in a small case size to save space and cost but without compromising bandwidth and signal integrity. The instrument outputs either standard or user-defined waveforms in the range of 100µHz and up to 80MHz.
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PXI/PXIe Arbitrary Generator Family
PXA(e)72xx
The arbitrary waveform generators of the PXA72xx family feature 16-bit resolution at a maximum sample rate of 200 ms per second. Furthermore, the devices can directly output voltages up to 30 V (or ±15 V).
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20GHz Dual Channel MW Signal Generator 19" 1U Rack
LSX2092R
The LSX2092R is a 20GHz Dual Channel Microwave Signal Generator, offers industry leading performance, in a 1U, 19” rack-mounted box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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NI-5741, 16-Bit, 1 MS/s, 16-Channel Signal Generator Adapter Module for FlexRIO
782864-01
The NI‑5741 provides simultaneously sampled analog output channels for signal generation. It also features single-ended, DC-coupled inputs and general-purpose digital input and output lines for system stimulus and control. The NI‑5741 is ideal for applications requiring high-channel density and the power of a user-programmable FPGA. Each channel has a user-configurable sample rate, and data is written directly from the FPGA. To use the NI‑5741, you must pair it with a compatible PXI FPGA Module for FlexRIO.
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2.5GS/s 16Bit 2GS Mem 4CH Arbitrary Waveform Generators
P2584B
The Proteus P2584B, is a 2.5GS/s, four channel arbitrary waveform generator packaged in a 4U, 19” standalone box with a 9” touch screen and on board PC , offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P2584B offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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50MS/s Four-Channel Arbitrary Waveform Generator
WW5064
The WW5064 offer a 50 MS/s four-channel universal waveform synthesizer. Each is built in a small case size to save space and cost but without compromising bandwidth and signal integrity. The instrument outputs either standard or user-defined waveforms in the range of 100µHz and up to 25MHz.
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2.5GS/s 16Bit 2GS Mem 8CH 16 Markers AWG
P2588D
The Proteus P2588D, is a 2.5GS/s, eight channel arbitrary waveform generator packaged in a 4U, half 19” dedicated chassis, offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P2588D offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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12GHz Single Channel Signal Generator
LS1291B
The LS1291B is a 12GHz Single Channel RF Analog Signal Generator, offers industry leading performance, in an easy to use benchtop box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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100MS/s Dual-Channel Arbitrary Waveform Generator
WW1072
The WW1072 represents a new dimension in arbitrary waveform generator design. With an unprecedented combination of arbitrary generator and synthesizer, versatility, high resolution and wide frequency range, and outstanding performance-to-price ratio, the WW1071 delivers diverse benefits that will facilitate tasks in many fields.
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3GHz Four Channel Signal Generator 19" 1U Rack Module
LS3084R
The LS3084R, 3GHz four channel RF Analog Signal Generator, offers industry leading performance, in a 1U, 19” space efficient, rack-mounted box. The LS3084R features four phase coherent channels, exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS3084R was designed to offer excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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3GHz 16-Channel Signal Generator 19" 3U Rack Module
LS30816R
The LS30816R, 3GHz 16 channel RF Analog Signal Generator, offers industry leading performance, in a 3U, 19” space efficient, rack-mounted box. The LS30816R features 16 phase coherent channels, exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. With the highest channel density in the market the LS30816R offer the ideal solution for applications requiring high channel count at minimum space and cost.
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Arbitrary Waveform Generator
VX2026
The VX2026 is a high speed (40MS/s), 14Bit, Arbitrary Waveform Generator for high performance testing. Built-in functions for pre-defined waveforms (sine, square, triangle, sawtooth) are available via software driver. Arbitrary waveforms will be loaded via data files into the on-board memory.
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NI-5742, 16-Bit, 1 MS/s, 32-Channel Signal Generator Adapter Module for FlexRIO
782865-01
The NI‑5742 provides simultaneously sampled analog output channels for signal generation. It also features single-ended, DC-coupled inputs and general-purpose digital input and output lines for system stimulus and control. The NI‑5742 is ideal for applications requiring high-channel density and the power of a user-programmable FPGA. Each channel has a user-configurable sample rate, and data is written directly from the FPGA. To use the NI‑5742, you must pair it with a compatible PXI FPGA Module for FlexRIO.
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12GHz Four Channel Signal Generator
LS1294B
The LS1294B is a 12GHz Four Channel RF Analog Signal Generator, offers industry leading performance, in an easy to use benchtop box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
