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Plasma Generators
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RF Plasma Generators & Amplifiers
100 W to 2400 W 13.56 MHz Analog/Digital, RS-232, USB interfaces Low Harmonic Distortion Automatic and Manual Gain Control High Speed Pulsing (Bursting) controls Compatible with T&C''''s Matching Networks GUI Software (complete PC control) Includes all essential RF power/communication cables and mounting brackets Air cooled (Air & Water 1200 W +) Half rack mount or stand alone versions Ideal for: Industrial, Scientific, and Medical Applications
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2 MHz RF Plasma Generators
NOVA® Series
The NOVA ; RF Plasma Generators are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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Plasma Power Generators
Advanced Energy’s field-proven, Precision PowerTM solutions offer extreme control, peerless arc handling, and cutting-edge match technology. Unlock new fabrication processes and benefit from our plasma power generators’ comprehensive capabilities.
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KEINOS™ 2 MHz 5 KW, 11 KW & 13 KW RF Plasma Generators
The KEINOS™ 2MHz plasma generator builds on the solid, reliable attributes of the existing 2MHz design. KEINOS™ incorporates the latest technology from MKS to enable demanding applications of pulsing, fast impedance changes and shorter process steps. KEINOS™ can deliver up to 13kW of power, pulsing up to 50KHz, multiple set point pulsing, pulse shaping and MKS patented frequency tuning. KEINOS™ uses an integrated VI sensor for power accuracy and digital based control for fast response times.
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Remote Plasma Sources
Semiconductor and Electronic Thin Film applications use plasma sources to generate low-energy ions and radicals to react with material surfaces and chamber walls to remove contaminants and act as a precursor to aid in material deposition. MKS provides multiple options for radical generation including Toroidal and Microwave based Remote Plasma Sources supporting Fluorine, NF3, oxygen, nitrogen and hydrogen process chemistries.
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Elite™ 13.56 MHz RF Plasma Generators
The elite™ Series of RF plasma generators provides state-of-the art technology in a compact air-cooled package. The elite is designed with high speed closed loop control, a class E RF deck and a switching modulator for superior output performance. The elite design utilizes a single printed circuit board assembly for the full rack product virtually eliminating all internal wires and connectors and thereby providing the highest reliability available.
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High Power Microwave Plasma System
The High Power Microwave Plasma System features the High Power Microwave Plasma Source, generator (with isolator) and auto-tuning system comprised of the Precision Power Detector and SmartMatch® unit. This comprehensive system delivers a high concentration of radicals with low electron temperatures for the highest dissociation and lowest recombination rates.
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13.56 MHz 1250, 2500 and 5000 Watt High-Reliability RF Plasma Generators
GHW Series
The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield.
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High Density Plasma Etching System for 200mm substrates
Model DRIE-1200-LL-ICP
Single process chamber for high rate plasma etching of 200mm wafers. Loadlocked. Stainless steel construction. Capabilities of smaller, multiple wafer throughput. Substrate materials include (but are not limited to) silicon, silicon oxynitrides, SiC, SiGe, Aluminum, and III-V compounds including GaAs, GaN, GaP, and InP. Stable plasma generation capabilities to below 1 mTorr. Five, Six, or Eight gas mass flow controllers are standard. Expanded or reduced numbers are available upon request.
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GHW Series 13.56 MHz, 1.25, 2.5, And 5.0 KW High-Reliability RF Plasma Generators
The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield. They are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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RF Plasma Generators
Choose from a broad range of RF plasma generators and access unique features for configuration, control, and application requirements. From various mounts and sizes to full digital control and plasma dynamic response, our RF generators can ignite your process innovation.
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Arbitrary Waveform Function Generator PXI Card
GX1110
The GX1110 is a high performance, single-channel PXI arbitrary waveform generator that offers function generator and arbitrary waveform generator functionality within one instrument. Built-in waveforms are available for use with both the DDS or AWG modes of operation and include Sine, Triangle, Ramp, Noise, Gaussian pulse and Sinx / x. A flexible sequencer is also available as part of the AWG's architecture, supporting the generation of complex waveforms.
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PCI-5421, 100 MS/s, 16-Bit Waveform Generator Device
778692-02
The PCI‑5421 can generate user-defined, arbitrary waveforms and standard functions, including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -6 V to +6 V and uses direct digital synthesis (DDS) to precisely generate waveforms. The PCI‑5421 also features advanced synchronization and data streaming capabilities.
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PXIe-5442, 43 MHz Bandwidth, 16-Bit Onboard Signal Processing, 32 MB, PXI Waveform Generator
780109-01
PXIe, 43 MHz Bandwidth, 16-Bit Onboard Signal Processing, 32 MB, PXI Waveform Generator—The PXIe‑5442 is a 43 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms, standard functions including sine, square, triangle, and ramp, as well as signals that require onboard signal processing. Some of these signal processing operations include FIR and CIC interpolation filters, digtal prefilter gain, numerically-controlled oscillator, and I/Q mixing for quadrature digital upcoversion. The PXIe‑5442 also features advanced synchronization and data streaming capabilities.
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6GHz Single Channel Signal Generator 19" 1U Rack Module
LS6081R
The LS6081R, 6GHz Single Channel RF Analog Signal Generator, offers industry leading performance, in a 1U, 19” rack-mounted box. The LS6081R features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS6081R was designed to offer excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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PXIe-5413, 20 MHz Bandwidth, 1-Channel, 16-Bit PXI Waveform Generator
784181-01
PXIe, 20 MHz Bandwidth, 1-Channel, 16-Bit PXI Waveform Generator - The PXIe-5413 is a 20 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -12 V to +12 V and uses a fractional resampling method to precisely generate waveforms. The PXIe-5413 also features advanced synchronization.
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180/400 MS/s Dual Channel PXI Express Arbitrary Waveform Generator
PXIe-1802
The Astronics Test Systems PXIe-1802 is a 2-channel Arbitrary Waveform Generator (AWG). Occupying just one PXI Express periphal slot or hybrid slot, this AWG offers the best speed and performance available for output frequencies up to 125 MHz
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40GHz Single Channel MW Benchtop Signal Generator
LXS4091B
The LSX4091B is a 40GHz Single Channel Microwave Signal Generator, offers industry leading performance, in an easy to use benchtop box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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1.25GS/s 16Bit 1GS Mem 2CH 4 Markers AWG
P1282D
The Proteus P1282D, is a 1.25GS/s, dual channel arbitrary waveform generator packaged in a 4U, half 19” dedicated chassis, offering technologically advanced options and configurations that integrate the ability to transmit and perform digital signal processing all in a single instrument. The P1282D offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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PXIe-5451, 145 MHz, 16-Bit, 2 GB PXI Waveform Generator
781204-03
PXIe, 145 MHz, 16-Bit, 2 GB PXI Waveform Generator—The PXIe‑5451 is a 145 MHz, dual‐channel arbitrary waveform generator capable of generating user-definied waveforms, standard functions, and I/Q communications signals. It is an ideal instrument for including in systems for testing devices with I/Q inputs, or as the baseband component of an RF vector signal generator as wells as time-domain signals like envelope tracking. The PXIe‑5451 also features onboard signal processing (OSP) functions that include pulse shaping and interpolation filters, gain and offset control, and a numerically controlled oscillator (NCO) for frequency shifting. The PXIe‑5451 also features advanced synchronization and data streaming capabilities.
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20GHz Single Channel MW Benchtop Signal Generator
LSX2091B
The LSX2091B is a 20GHz Single Channel Microwave Signal Generator, offers industry leading performance, in an easy to use benchtop box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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VXI Waveform Generators
Astronics Test Systems offers VXI Arbitrary Waveform Generators with a long, reliable heritage for military use.
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1.25GS/s 16Bit 1GS Mem 2CH 4 Markers Arbitrary Waveform Generator
P1282B
The Proteus P1282B, is a 1.25GS/s, dual channel arbitrary waveform generator packaged in a 4U, 19” standalone box with a 9” touch screen and on board PC , offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P1282B offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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PXIe-5413, 20 MHz Bandwidth, 2-Channel, 16-Bit PXI Waveform Generator
785114-01
PXIe, 20 MHz Bandwidth, 2-Channel, 16-Bit PXI Waveform Generator - The PXIe-5413 is a 20 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -12 V to +12 V and uses a fractional resampling method to precisely generate waveforms. The PXIe-5413 also features advanced synchronization.
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PXI-5404, 100 MHz Bandwidth, 1-Channel, 12-Bit PXI Waveform Generator
778577-02
The PXI‑5404 is a 100 MHz clock generator capable of generating clock and sine wave signals and some other standard functions. This clock generator can generate signals from -1 V to +1 V and uses direct … digital synthesis (DDS) to precisely generate waveforms.
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6GHz RF Analog Signal Generator Module
LS6081D
The LS6081D, 6GHz Single Channel RF Analog Signal Generator, offers industry leading performance, combined with a compact small footprint form factor. The LS6081D features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS6081D was designed to offer industry leading price to performance ratio, needed from the R&D benches to the production lines.
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3GHz Dual Channel Signal Generator
LS3082B
The LS3082B is a 3GHz Dual Channel RF Analog Signal Generator, offers industry leading performance, in an easy to use benchtop box. It features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The design offers excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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Dual Channel Arbitrary Waveform Generator 1.25GS/s 16Bit 1GS Mem 2CH 4 Markers AWG
P1282M
The Proteus P1282M, is a PXIe based, 1.25GS/s, dual channel arbitrary waveform generator. The P1282M offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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2.5GS/s 16Bit 2GS Mem 12CH Arbitrary Waveform Generators
P25812B
The Proteus P25812B, is a 2.5GS/s, twelve channel arbitrary waveform generator packaged in a 4U, 19” standalone box with a 9” touch screen and on board PC , offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P25812B offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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1.25GS/s 16Bit 1GS Mem 4CH Arbitrary Waveform Generators
P1284B
The Proteus P1284B, is a 1.25GS/s, four channel arbitrary waveform generator packaged in a 4U, 19” standalone box with a 9” touch screen and on board PC , offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P1284B offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
