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Plasma Generators
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RF Plasma Generators
Choose from a broad range of RF plasma generators and access unique features for configuration, control, and application requirements. From various mounts and sizes to full digital control and plasma dynamic response, our RF generators can ignite your process innovation.
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Plasma Power Generators
Advanced Energy’s field-proven, Precision PowerTM solutions offer extreme control, peerless arc handling, and cutting-edge match technology. Unlock new fabrication processes and benefit from our plasma power generators’ comprehensive capabilities.
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13.56 MHz 1250, 2500 and 5000 Watt High-Reliability RF Plasma Generators
GHW Series
The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield.
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High Power Microwave Plasma System
The High Power Microwave Plasma System features the High Power Microwave Plasma Source, generator (with isolator) and auto-tuning system comprised of the Precision Power Detector and SmartMatch® unit. This comprehensive system delivers a high concentration of radicals with low electron temperatures for the highest dissociation and lowest recombination rates.
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Remote Plasma Sources
Semiconductor and Electronic Thin Film applications use plasma sources to generate low-energy ions and radicals to react with material surfaces and chamber walls to remove contaminants and act as a precursor to aid in material deposition. MKS provides multiple options for radical generation including Toroidal and Microwave based Remote Plasma Sources supporting Fluorine, NF3, oxygen, nitrogen and hydrogen process chemistries.
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2 MHz RF Plasma Generators
NOVA® Series
The NOVA ; RF Plasma Generators are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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Elite™ 13.56 MHz RF Plasma Generators
The elite™ Series of RF plasma generators provides state-of-the art technology in a compact air-cooled package. The elite is designed with high speed closed loop control, a class E RF deck and a switching modulator for superior output performance. The elite design utilizes a single printed circuit board assembly for the full rack product virtually eliminating all internal wires and connectors and thereby providing the highest reliability available.
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In Situ Diagnostics
For researchers working on ultra thin films and novel interfaces, Neocera offers insitu, real-time process control and diagnostic tools such as high-pressure RHEED, Low Angle X-ray Spectroscopy (LAXS) and Ion Energy Spectroscopy (IES). RHEED provides exceptional growth control via RHEED intensity oscillations and the Structural data via diffraction. LAXS is a complimentary to RHEED and provides real-time Compositional information. IES provides energetics of the laser generated plasma plume which is directly responsible for obtaining high quality films and interfaces.
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RF Plasma Generators & Amplifiers
100 W to 2400 W 13.56 MHz Analog/Digital, RS-232, USB interfaces Low Harmonic Distortion Automatic and Manual Gain Control High Speed Pulsing (Bursting) controls Compatible with T&C''''s Matching Networks GUI Software (complete PC control) Includes all essential RF power/communication cables and mounting brackets Air cooled (Air & Water 1200 W +) Half rack mount or stand alone versions Ideal for: Industrial, Scientific, and Medical Applications
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KEINOS™ 2 MHz 5 KW, 11 KW & 13 KW RF Plasma Generators
The KEINOS™ 2MHz plasma generator builds on the solid, reliable attributes of the existing 2MHz design. KEINOS™ incorporates the latest technology from MKS to enable demanding applications of pulsing, fast impedance changes and shorter process steps. KEINOS™ can deliver up to 13kW of power, pulsing up to 50KHz, multiple set point pulsing, pulse shaping and MKS patented frequency tuning. KEINOS™ uses an integrated VI sensor for power accuracy and digital based control for fast response times.
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GHW Series 13.56 MHz, 1.25, 2.5, And 5.0 KW High-Reliability RF Plasma Generators
The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield. They are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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200MS/s Four-Channel Arbitrary Waveform Generator
WW2074
The WW2074 offer a 200 MS/s four-channel universal waveform synthesizer. Each is built in a small case size to save space and cost but without compromising bandwidth and signal integrity. The instrument outputs either standard or user-defined waveforms in the range of 100µHz and up to 80MHz.
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16 Bit Waveform Generator
PA72G16400
The PA72G16400 is a 16-bit arbitrary waveform generator, capable of generating waveforms at speeds up to 400Msps. The high resolution and the high sample rate allows generating signals with very low quantization noise levels. An onboard offset voltage source allows generating offset signals while maintaining optimal utilization of the DAC’s digital range. With the 8MWord of memory, there is lots of room for uploading several different patterns, allowing switching patterns with minimal bus communication.
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PXIe Vector Modulator
M9316A
The M9316A PXIe Vector Modulator is a 3-slot module with integrated wideband IQ modulator and arbitrary waveform generator (AWG) designed to work with the M9383A PXIe Microwave Signal Generator. When ordered with M9383A, it can support 1MHz to 20 GHz frequency coverage, up to 160 MHz RF bandwidth, and up to 1 Giga-sample of AWG playback memory. (See M9383A PXIe Microwave Signal Generator options.
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9GS/s 8Bit, 4GS Mem 2CH 8 Markers AWG
P9082B
The Proteus P9082B, is a 9GS/s, dual channel arbitrary waveform generator packaged in a 4U, 19” standalone box with a 9” touch screen and on board PC , offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P9082B offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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PXI-5404, 100 MHz Bandwidth, 1-Channel, 12-Bit PXI Waveform Generator
778577-02
The PXI‑5404 is a 100 MHz clock generator capable of generating clock and sine wave signals and some other standard functions. This clock generator can generate signals from -1 V to +1 V and uses direct … digital synthesis (DDS) to precisely generate waveforms.
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9GS/s 8Bit, 4GS Mem 2CH 8 Markers AWG
P9082D
The Proteus P9082D, is a 9GS/s, dual channel arbitrary waveform generator packaged in a 4U, half 19” dedicated chassis, offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P9082D offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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PXI-5422, 80 MHz Bandwidth, 16-Bit PXI Waveform Generator
779087-02
80 MHz Bandwidth, 16-Bit PXI Waveform Generator - The PXI‑5422 is a 80 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -6 V to +6 V and uses direct digital synthesis (DDS) to precisely generate waveforms. The PXI‑5422 also features advanced synchronization and data streaming capabilities.
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3GHz Four Channel Signal Generator 19" 1U Rack Module
LS3084R
The LS3084R, 3GHz four channel RF Analog Signal Generator, offers industry leading performance, in a 1U, 19” space efficient, rack-mounted box. The LS3084R features four phase coherent channels, exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS3084R was designed to offer excellent performance and abilities combined with an affordable price tag, needed from the R&D benches to the production lines.
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50MS/s PCIBus Arbitrary Waveform Generator
5325
Model 5325 is a Single-Channel Arbitrary Waveform Generator that combines many powerful functions in one small package. Supplied free with the instrument is ArbConnection software, which is used for controlling the 5325 and for generating, editing and downloading waveforms from a remote computer.
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Arbitrary Waveform Generator PCI Card
GC1300
The GC1300 is a single-channel PCI-based Arbitrary Waveform Generator. It is a high performance waveform generator that combines many powerful functions in one small package. Supplied free with the instrument is Arbconnection software, which is used for controlling the GC1300 and for generating, editing and downloading waveforms from a remote computer.
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3GHz Single Channel Portable Signal Generator
LS3081P
The LS3081P, 3GHz Single Channel RF Analog Signal Generator, offers industry leading performance, in a modern tablet like design that can be used as a benchtop or portable unit. The LS3081P features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS3081P was designed to offer excellent performance and meet today’s most demanding applications, whether in the lab or out in the field.
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PXIe-5423, 40 MHz Bandwidth, 2-Channel, 16-Bit PXI Waveform Generator
785116-01
PXIe, 40 MHz Bandwidth, 16-Bit PXI Waveform Generator—The PXIe-5423 is a 40 MHz arbitrary waveform generator capable of generating user-defined, arbitrary waveforms and standard functions including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -12 V to +12 V and uses a fractional resampling method to precisely generate waveforms. The PXIe-5423 also features advanced synchronization and generation features like waveform scripting and streaming.
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PCI-5412, 100 MS/s, 14-Bit Waveform Generator Device
779177-01
The PCI‑5412 can generate user-defined, arbitrary waveforms and standard functions, including sine, square, triangle, and ramp. This arbitrary waveform generator can generate signals from -6 V to +6 V and uses direct digital synthesis (DDS) to precisely generate waveforms.
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Arbitrary Waveform Function Generator PXI Card
GX1110
The GX1110 is a high performance, single-channel PXI arbitrary waveform generator that offers function generator and arbitrary waveform generator functionality within one instrument. Built-in waveforms are available for use with both the DDS or AWG modes of operation and include Sine, Triangle, Ramp, Noise, Gaussian pulse and Sinx / x. A flexible sequencer is also available as part of the AWG's architecture, supporting the generation of complex waveforms.
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1.25GS/s 16Bit 1GS Mem 8CH Arbitrary Waveform Generators
P1288B
The Proteus P1288B, is a 1.25GS/s, eight channel arbitrary waveform generator packaged in a 4U, 19” standalone box with a 9” touch screen and on board PC , offering technologically advanced options and configurations that integrate the ability to transmit, receive and perform digital signal processing all in a single instrument. The P1288B offers industry leading performance Including an innovative task oriented programming, real time data streaming, fast feedback loop for environment dependent waveform generation and user customizable FPGA for application specific solutions.
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Analog Output / Arbitrary Waveform Generator
GX1632e
The GX1632e is a 3U PXI Express digital to analog output board designed specifically for applications where multiple DC or AC analog outputs are required. The GX1632e offers 32 output channels with 16-bits of precision signal sourcing performance. Three modes of operation are available including Analog Output, Arbitrary Waveform Generation (ARB) and Data Streaming.
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2-Channel Arbitrary Waveform Generator
3156C
Racal Instruments™ 3156C Dual Channel Arbitrary Waveform Generator outputs 16-bit waveforms from 2 channels at up to 225 MS/s. 12-bit digital patterns may be output at rates up to 200 Mbits/s.
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NI-5741, 16-Bit, 1 MS/s, 16-Channel Signal Generator Adapter Module for FlexRIO
782864-01
The NI‑5741 provides simultaneously sampled analog output channels for signal generation. It also features single-ended, DC-coupled inputs and general-purpose digital input and output lines for system stimulus and control. The NI‑5741 is ideal for applications requiring high-channel density and the power of a user-programmable FPGA. Each channel has a user-configurable sample rate, and data is written directly from the FPGA. To use the NI‑5741, you must pair it with a compatible PXI FPGA Module for FlexRIO.
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12GHz Single Channel Portable Signal Generator
LS1291P
The LS1291P, 12GHz Single Channel RF Analog Signal Generator, offers industry leading performance, in a modern tablet like design that can be used as a benchtop or portable unit. The LS1291P features exceptionally fast switching speed, superior signal integrity and purity and all the necessary modulated signals for analog communication systems. The LS1291P was designed to offer excellent performance and meet today’s most demanding applications, whether in the lab or out in the field.