Thin Film
layer of material ranging < a nanometer to > a micrometer in thickness.
See Also: Film, Ellipsometers
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Thin Films, Plasma and Surface Engineering
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A residual gas analyser for vacuum process analysis. Measures the vacuum process gas composition, contamination and leak detection.
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Product
Benchtop Metrology Solution
FilmTek 2000 PAR-SE
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Scientific Computing International
Our most advanced benchtop metrology solution, engineered to meet the needs of nearly any advanced thin film measurement application, from R&D to production. Combines spectroscopic ellipsometry and DUV multi-angle polarized reflectometry with a wide spectral range to deliver the highest accuracy, precision, and versatility in the industry. Patented parabolic mirror technology allows for a small spot size down to 50µm, ideal for direct measurement of product wafers and patterned films.
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Product
Semiconductor Technology, Micro Scriber + Flatness, Bow, Warp, Curvature, Glass Thickness
FLATSCAN
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Optik Elektronik Gerätetechnik GmbH
Non contact automated 2D- or 3D measurement of warp, bow, slope and surface curvature with software module for calculation of thin film stress (wafer stress) of wafers and glass substrates.
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Product
200GHz DWDM Module(4,8,16 Channel)
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Flyin Optronics’ 200GHz dense wavelength division multiplexer (DWDM) utilizes thin film coating technology and proprietary design of non-flux metal bonding micro optics packaging to achieve optical add and drop at the ITU wavelengths. It provides ITU channel center wavelength, low insertion loss, high channel isolation, wide pass band, low temperature sensitivity and epoxy free optical path . It can be used for wavelength add/drop in telecommunication network system.
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Product
Instrumented Indentation Tester
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With Anton Paar’s versatile indentation testers you can precisely determine the mechanical properties of thin films, coatings, or substrates such as hardness and elastic modulus. The instruments handle almost any type of material, whether soft, hard, brittle, or ductile. You can also conduct creep, fatigue, and stress-strain studies on surfaces in the nanometer range.
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Product
CWDM Mux/Demux in LGX Box(4,8,16,18-Channel)
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Flyin Optronics’ Coarse wavelength division multiplexer (CWDM Mux/Demux) utilizes thin film coating technology and proprietary design of non-flux metal bonding micro optics packaging. It provides low insertion loss, high channel isolation, wide pass band, low temperature sensitivity and epoxy free optical path.
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Power Amplifiers
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RPG Medium Power Amplifiers are developed and manufactured by using most modern discrete components and thin film technologies, in order to cover the frequency range 50 to 130 GHz. With improved DC-supply and modern semiconductors these medium power amplifiers not only deliver high power output but also superior power added efficiency (PAE) and higher linearity. These medium power amplifiers are available as a standard product and on request as a customized manufactured product..
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Product
Thin Film Chip Resistors, High Reliability Type
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Panasonic Industrial Devices Sales Company of America
An AEC-Q200 Compliant SeriesPanasonic components specified as AEC-Q200 Compliant are consistently designed into automotive systems. However, today’s Design Engineers are specifying AEC-Q200 components to meet the high-quality standards of devices beyond automotive applications.
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Multi-Element Standards
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These multi-element standards consist of multi-layer thin film coatings, one on top of the other, upto a maximum of 6 elemental coatings. It is generally recommended to have coating thicknesses < 20 µg/cm2, so as to cause negligible notable matrix effects, in particular absorption of X-rays emitted in lower deposits by those covering them.
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Low Noise Amplifiers
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RPG Low Noise Amplifiers are developed and manufactured using the most modern discrete components and thin film technologies, in order to cover the frequency range 50 to 350 GHz. With improved DC-supply and modern semiconductors these amplifiers not only deliver low noise performance but also broad operating bandwidth and gain flatness. These low-noise amplifiers are available as a standard product and on request as customized manufactured product.
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Product
In-Line Spectroscopic Ellipsometer for Web Coater and Roll to Roll Systems
UVISEL
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The UVISEL Spectroscopic Phase Modulated Ellipsometer is a turn-key thin film metrology instrument for in-line measurement of thin film thickness and optical properties. It features rapid measurement capability with data acquired every 50 ms for powerful control of thin film uniformity across the entire web.The design of the UVISEL ellipsometric heads allows simple integration into roll-to-roll systems, while the software provides advanced communication capabilities suited to roll-to-roll production.
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Product
ALD For Manufacturing And Production
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Uniformity over large substrates, reproducibility, and low temperature deposition make ALD an ideal candidate for the next generation of large-scale manufacturing thin film technology.
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Product
80-CH 50G Athermal AWG
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Athermal AWG(AAWG) have equivalent performance to standard Thermal AWG(TAWG) but require no electrical power for stabilization. They can be used as direct replacements for Thin Film Filters(Filter type DWDM module) for cases where no power is available, also suitable for outdoor applications over -30 to +70 degree in access networks. Flyin’s Athermal AWG(AAWG) provide excellent optical performance, high reliability, ease of fiber handling and power saving solution in a compact package. Different input and output fibers, such as SM fibers, MM fibers and PM fiber can be selected to meet different applications. We can just offer 19” 1U rackmount package for 50G AWG products.
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Materials Metrology
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Nova is a market leader for innovative thin film metrology and process control technologies. We develop highly sensitive in-line metrology solutions on high productivity platforms, thereby enabling critical metrology solutions to be closer to a semiconductor fab’s process and integration needs.Our technologies enable customers to accurately detect and quantify small variations in film composition and thickness, thereby influencing better device functionality, and improved manufacturing yield.
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Product
Micro-spot Spectroscopic Reflectometry
FilmTek 2000M
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Scientific Computing International
Micro-spot size benchtop metrology system engineered for unparalleled versatility and high performance, meeting the needs of patterned film applications requiring a very small spot size. Allows for measurement spot sizes as small as 2µm, and delivers reliable measurement of both thin and thick films.
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Scatterometers/ Thin Film Metrology Systems
LittleFoot Series
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The n&k LittleFoot-CD, and LittleFoot-CD450 are DUV-Vis-NIR scatterometers/thin film metrology systems, based on polarized reflectance measurements (Rs and Rp) from 190nm to 1000nm, with microspot technology. The systems in the LittleFoot-CD Series determine thickness, n and k spectra from 190nm-1000nm of thin films, as well as depths, CDs, and profiles of trenches and contact holes.
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Product
Powerful and Cost Effective Spectroscopic Ellipsometer
Smart SE
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The Smart SE from HORIBA Scientific is a versatile spectroscopic ellipsometer for fast and accurate thin film measurements. It characterizes thin film thickness from a few Angstroms to 20µm, optical constants (n,k), and thin film structure properties (such as roughness, optical graded and anisotropic layers, etc).The spectral range from 450 to 1000nm is measured in a few seconds and ellipsometric data are analyzed using the DeltaPsi2 software platform. The software integrates two levels of software to fulfil both routine analysis with predefined recipes and advanced analysis with state-of-the art ellipsometric modelling.
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Product
Surface Quality Monitors
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PET manufactures and markets non-destructive, non-contact surface contamination and thin film detection models and automated systems (surface quality monitoring system) capable of detecting thin layer contamination, thin films and coating down to the Angstrom level. These systems represent a major breakthrough by providing, for the first time, a quantitative measure of surface cleanliness. As surface cleanliness verification instruments, in a part cleaning environment, these products are capable of validating the cleaning quality of all the part cleaning equipment available in the market. Any of SQM model series is capable of verifying metal contamination; monitoring absence/presence of organic and/or inorganic on virtually on surfaces of all metals. They are, price/performance, the most sufficient product available for testing surface of metals for surface cleanliness. These systems operate in an ambient environment, require no sample preparation or deposit of any agents on the surface. In any parts cleaning environment where the quality and efficiency of part cleaning equipment for removal of surface contamination is highly desired, these systems provide a scientific solution by quantitatively measuring the surface cleanliness. The SQM series has the sensitivity and operational simplicity required to provide fast and cost effective surface evaluation for all metals.
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Product
X-ray Fluorescence Measuring System
FISCHERSCOPE X-RAY 5000
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Inline measuring with highest precision for thin films. Robust XRF instrument for measuring and analyzing thin films and layer systems in the running process with connection to the production control system.
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Product
Reflectance Standards
STAN Series
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Ocean Optics offers specular reflectance standards for measuring shiny surfaces such as machined metals and semiconductor materials and low-reflectivity surfaces such as anti-reflective coatings and thin film coatings. The STAN-SSH varies in reflectivity from 87%-98% over the 200-2500 nm wavelength range and is available in a version (STAN-SSH-NIST) calibrated to a NIST master standard. The NIST calibration data range is 250-2500 nm.
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Product
40-CH 100G Athermal AWG
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Athermal AWG(AAWG) have equivalent performance to standard Thermal AWG(TAWG) but require no electrical power for stabilization. They can be used as direct replacements for Thin Film Filters(Filter type DWDM module) for cases where no power is available, also suitable for outdoor applications over -30 to +70 degree in access networks. Flyin’s Athermal AWG(AAWG) provide excellent optical performance, high reliability, ease of fiber handling and power saving solution in a compact package. Different input and output fibers, such as SM fibers, MM fibers and PM fiber can be selected to meet different applications. We can also offer different product packages, inluding special metal box and 19” 1U rackmount.
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Product
CWDM Mux/Demux Module（4,8,16,18-Channel）
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Flyin Optronics’ Coarse wavelength division multiplexer (CWDM Mux/Demux) utilizes thin film coating technology and proprietary design of non-flux metal bonding micro optics packaging. It provides low insertion loss, high channel isolation, wide pass band, low temperature sensitivity and epoxy free optical path.
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Customized Ellipsometers
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~0.1 nm thickness difference can be seen by IE-1000.Thickness distribution of thin film can be imaged.Thickness and optical images of semiconductor device, display, and bio samples.IE-1000 can show the images which can not be seen by conventional microscope.Defect of semiconductor and display can be seen directly.Easy and fast operation.
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100GHz DWDM Module(4,8,16 Channel)
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Flyin Optronics’ 100GHz dense wavelength division multiplexer (DWDM) utilizes thin film coating technology and proprietary design of non-flux metal bonding micro optics packaging to achieve optical add and drop at the ITU wavelengths. It provides ITU channel center wavelength, low insertion loss, high channel isolation, wide pass band, low temperature sensitivity and epoxy free optical path . It can be used for wavelength add/drop in telecommunication network system.
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Product
3-Axis Non-Robotic Automated Testing System
AT3
Test Instrument
The Instron AT3 is a space-efficient, highly adaptable 3-axis mechanical testing platform designed for automated execution of tensile, compression, flexural, and lap shear tests. Built to comply with a broad spectrum of ASTM and ISO standards, it’s well-suited for evaluating materials such as plastics, elastomers, thin films, foils, and metals. The system streamlines the entire testing workflow from specimen measurement and handling to strain measurement and specimen disposal—enabling users to load up to 160 samples and let the AT3 take care of the rest. Boost productivity, reduce manual intervention, and achieve consistent, dependable results with every test cycle.
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Scanning Auger Nanoprobe
PHI 710
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The PHI 710 Scanning Auger Nanoprobe is a unique, high performance Auger Electron Spectroscopy AES instrument that provides elemental and chemical state information from sample surfaces and nano-scale features, thin films, and interfaces. Designed as a high performance Auger, the PHI 710 provides the superior Auger imaging performance, spatial resolution, sensitivity, and the spectral energy resolution needed to address your most demanding AES applications.
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Product
100G,200G 1X2 DWDM Device (3Ports)
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Flyin optronics’ 100GHz/200GHz 1x2 wavelength multiplexer utilizes thin film coating technology and proprietary design of non-flux metal bonding micro optics packaging to achieve optical add or drop at a ITU wavelength. It provides ITU channel center wavelength, low insertion loss, high channel isolation, wide pass band, low temperature sensitivity and epoxy free optical path . It can be used for wavelength add/drop in telecommunication network system.
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Product
Explosion Proof In-line Hydrogen Process Analyzer
HY-OPTIMA™ 2700 Series
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The HY-OPTIMA™ 2700 Series uses a solid-state, non consumable sensor that is configured to operate in process gas streams. The H2scan thin film technology provides a direct hydrogen measurement that is not cross sensitive to other gases. The HY-OPTIMA™ 2700 Series is ideal for applications where real-time, hydrogen specific measurements can enhance process plant efficiencies, diagnostics and maintenance management.
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Product
Solar Photovoltaic
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Scientific Computing International
Automated metrology system designed for rapid, reliable, and accurate characterization of nearly any unpatterned thin film.
