Metrology
field of measurement.
See Also: Measurement, Instrumentation, Coordinate Measuring Machines
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kSA ACE
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The kSA Atomic Control for Epitaxy (ACE) metrology tool is a highly sensitive instrument that measures the in situ flux rate of atomic species using the principle of atomic absorption spectroscopy.
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Compound Semi | MEMS | HDD Manufacturing
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KLA has a comprehensive portfolio of inspection, metrology, and data analytics systems to support power devices, RF communications, LED, photonics, MEMS, CPV solar and display manufacturing. High brightness LEDs are becoming commonly used in solid-state lighting and automotive applications, and LED device makers are targeting aggressive cost and performance improvements, requiring more emphasis on improved process control and yield. Similarly, leading power device manufacturers are targeting faster development and ramp times, high product yields and lower device costs, and are implementing solutions for characterizing yield-limiting defects and processes. KLA's inspection, metrology and data analytics systems help these manufacturers control their processes and increase yield.
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Metrology System
Aspect
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Memory density increases with both layer-pair scaling and tier stacking for memory stacks well over 200 pairs. The Aspect metrology system was designed with these future architectures and scaling strategies in mind. Aspect metrology is demonstrating performance superior to X-ray systems across multiple customer devices through a revolutionary infrared optical system providing full profiling capability to enable critical etch and deposition control, with the speed and process coverage that customers require.
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Optical Thin-Film Metrology for Advanced Thin Films
FilmTek 6000 PAR-SE
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Scientific Computing International
Production-proven metrology system for film thickness, refractive index and stress measurement for a broad range of film layers at the 1x nm design node and beyond. Accommodates 200 or 300 mm wafer metrology. Combines spectroscopic ellipsometry and DUV multi-angle polarized reflectometry with a wide spectral range to meet the challenging demands associated with multi-patterning and other leading-edge device fabrication techniques.
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Dimensional Metrology System
PINNACLE PLUS
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Pinnacle+ Plus elevates Pinnacle performance to the next level. Pinnacle+ Plus features a rigid granite optical support structure and a high performance Z-axis motion assembly to produce the lowest possible uncertainty on micro-electronic parts and assemblies/
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Monolithic Laser Combiners & Precision Optics
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For more than 40 years, our vertically integrated in-house production teams have relied on collaborative interdisciplinary processes to drive product performance and manufacturability. And we back up everything we do with industry-leading metrology to ensure that the building blocks of our technology – fabrication, coating, and assembly – permanently align to your exacting specifications to deliver consistent, shipment-to-shipment product performance, even in the most demanding environments.
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Product
SF6 Decomposition Products Detector
JH4000A-4
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Xiamen Jiahua Electrical Technology Co.,Ltd
JH4000A-4 SF6 Electrical Equipment Decomposition Products Detector is a high precision, intelligent and portable device, able to make judgment rapidly and correctly based on the content of main decomposition products of insulation materials inside the SF6 electrical equipment like SF6 circuit breaker, instrument transformer, GIS and transformer. It detects SO2+SOF2, H2S, CO and HF. It is reliable, accurate and stable. Inspected by authorities such as the National Institute of Metrology, the device, having excellent performance, complies with relevant international and national standards. It is a product recommended for use by the State Power Grid Company. Decomposition products detection provides reliable evidence for the internal fault diagnosis and it is an effective measure for preventive and corrective maintenance.
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InnovMetric-Polyworks Software
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PolyWorks is a powerful industrial 3D metrology software solution.
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Laser Interferometers & Calibration Systems
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Keysight Technologies is a world leader in the design and manufacture of laser interferometry systems, advanced electronic measurement systems, high-precision optical components, complex monolithic optics (CMOs), and opto-electronic systems design for the most demanding metrology applications. Keysight systems offer high precision in a wide dynamic range, the ability to simultaneously measure a position with multiple degrees of freedom, and the highest accuracy available in both air and vacuum systems.
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Primary Standard Capacitors
GenRad 1404 Series
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The GenRad 1404 Series standard capacitors are the standard of choice in metrology labs, and still used today by standards bodies around the world. These capacitors have been designed as primary reference standards of capacitance with which working standards can be compared.
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Customized Semiconductor Wafer Inspection, Sorting & Metrology Equipment | Systems
Customized Solutions
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Unique Needs? Need better wafer inspection throughput, accuracy, versatility? Need a wafer defect inspection expert who’s not a sales person? We’ve been providing complete semiconductor wafer inspection, sorter, and microscopes solutions to semiconductor wafer manufacturers since 1994.
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Portable Metrology‑Grade 3D Scanner
Black Series
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The HandySCAN 3D | BLACK Series delivers accurate, high-resolution and repeatable results, regardless of the measurement setup quality and no matter the user experience. Featuring dynamic referencing, both the scanner and part can move during measurement and still provide an accurate and high‑quality scan.
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QE Systems
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Abet Technologies offers a range of standard EQE and IQE measurement systems. Model QE-1100 is configured with the most useful components for single junction devices. It has a 350 – 1100 nm range. The QE-1800 is configured with components most useful for components for triple junction cells. Beyond the standard systems offered systems can be custom configured to meet a customer’s metrology needs.
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Metrology System
Echo
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The Echo system is a comprehensive in-line metal film metrology tool for single and multi-layer metal film measurements in leading-edge logic, memory, advanced packaging, and specialty semiconductor devices.
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Stationary Test Equipment
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Single- and three-phase, standardized and individual test systems are covering all legal metrological test requirements for simple meters, high precision multifunction meters, smart meters and reference standards. Flexible and modular system components for the optimal customer orientated solution.
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Optical Filter Sets
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Our filter sets support a great range of fluorophores for microscopes and imaging systems. Patented design techniques drive some of the most spectrally sophisticated optical filters on the market. High transmission, steep edges, precise spectral edge placement, and optimized blocking combine for more reliable measurements. A wide selection of individual bandpass filters and dichroic beam-splitters support unique applications, and world-class manufacturing and cutting-edge metrology ensure consistent performance that always meets specifications.
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Add-ons For Metrology
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We offer add-on products for Optical Frequency Combs and metrology applications. These include heterodyne photodetectors (BDU), and highly stable RF oscillators, just to name a few.
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Multiple Angle Reflectometry
FilmTek 4000
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Scientific Computing International
Fully-automated wafer metrology optimized for photonic integrated circuit manufacturing. Delivers unmatched measurement accuracy, with a 100x performance advantage over the best non-contact method and 10x that of the best prism coupler contact systems. Designed to enable optical component manufacturers to increase functional yield of their products, reliably and at lower cost.
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Fizeau Interferometers
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Fizeau interferometers offer an unmatched combination of performance, quality and value in optical metrology. They produce accurate, repeatable interferometric measurements of surface shape, radius of curvature and transmitted wavefront quality.
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Manufactoring
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Applied Automation Technologies, Inc
CAPPS is one of the first CAD based online CMM software. AAT developed CAPPS to be an upwardly mobile metrology software with a strong graphics engine, complete CAD capability, a powerful programming language with DMIS and tree view structure as well as a flexible reporting environment. With over 20 years of evolution, CAPPS has been the leader in CAD based measurement software. AAT offers several products derived from the CAPPS system serving specific needs of customers.CAPPS is available in 3 separate versions. Each designed to meet the particular needs of its users:
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Metrology Solutions for Semiconductors
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Bruker Semiconductor develops, manufactures, markets, and supports metrology solutions for thin films, which are based on novel, rapid, non-contacting and non-destructive X-ray technology. With Bruker’s acquisition of Jordan Valley Semiconductors, a name synonymous with unparalleled worldwide customer service and support, 75% of the world's top 25 semiconductor manufacturers rely on Bruker metrology tools for front-end and back-end applications, including development of their next-generation thin films. Bruker commitment to innovation and technology leadership drives the continued release of new advancements in metrology, and has garnered numerous awards and industry recognition. In applications ranging from C-S thin films materials characterization to wafer substrate analysis and defect detection, Bruker’s systems provide simulation analysis and fit. HRXRD, XRR, WA-XRD, and XRDI measurement types are fully supported, enabling researchers, production engineers, and process developers unparalleled capabilities. Whether you are a semi and C-S fabricator, R&D center or academy, or an industry materials research facility, Bruker has a specifically designed solution for your metrology needs.
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Express Analyzer
MAYA Express
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Lyncis Express Analyzer was developed to answer the need for fast and reliable material chemical composition analysis. The application is valued by the clients where modern agile manufacturing metrology being applied and quick assessment of material is necessary to adjust critical process parameters without waiting on the lab results.
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PuroMaxx Contamination Control
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Brooks offers the industry’s most advanced suite of FOUP carrier/reticle pod cleaners and photomask/reticle stockers. Using state-of-the-art humidity control along with in-situ metrology, our products address all critical airborne molecular contamination, productivity, and process stability challenges at sub20-nm nodes.
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Metrology Software
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ZYGO has been developing metrology software for decades – our commitment to helping our customers measure confidently, and the heart of our quality guarantee. Our original instrument software, MetroPro, established itself as a gold standard in the optical metrology world. Now, its successor Mx continues that legacy: trusted, easy to use, and heavily customizable.
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Adapter, 2.4 mm (f) to 3.5 mm (m), DC to 26.5 GHz
11901D
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The Keysight 11901D is a metrology grade, 2.4 mm female to 3.5 mm male adapter with dc to 26.5 GHz operation.
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Full 3D Inline Metrological & Imaging AOI
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Metrological Full 3D AOI is achieved by measuring all 3 dimensions (X, Y and Height) to detect every measurable solder and component defect pre-reflow and/or post reflow soldering.
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Metrology Device
XPLOR 100
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XPLOR 100 is a state of the art, fully automated metrology device designed for measurement and analysis of bubbles and inclusions for optical substrates in the Visible and NIR wave-bands.
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Calibration Baths
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Fluke Calibration temperature baths provide optimal temperature environments for “secondary” or “comparison” temperature calibrations. They offer unsurpassed stability and uniformity, a large working volume, and flexibility for performing thermometer calibration on calibrating a variety of temperature sensors. A world-class temperature controller and 30+ years of experience make these the choice of National Metrology Institutes and calibration laboratories worldwide. Fluke Calibration temperature baths include: compact temperature baths; deep-well temperature baths; standard calibration baths; resistor maintenance baths; ice-point baths; bath / temperature controllers.
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Precision Connectors
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Rosenberger Hochfrequenztechnik GmbH & Co. KG
Connectors form the electronic bridge for active and passive components and devices in a variety of applications. In the laboratory and metrology sector – for example in research and development, testing or quality assurance departments – precision connectors are used due to the detailed requirements for technology and processes.
