Metrology
field of measurement.
See Also: Measurement, Instrumentation, Coordinate Measuring Machines
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Photonics Test Solutions
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Chroma offers precision instruments such as laser drivers, photodetector monitoring, and temperature controllers. These lab class instruments are often intefrated into production solutions for wafer probe test, burn-in and device or module characterization with inspection, metrology, robotics, Industry 4.0 and more.
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Dimensional Metrology
Stand-Alone Metrology Family
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Nova’s stand-alone metrology platforms are utilized to characterize critical dimensions such as width, shape and profile with high precision and accuracy and are used in multiple areas of the fab such as photolithography, etch, CMP and deposition in the most advanced technology nodes, across all semiconductor leading customers.
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Dimensional Metrology
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Nova offers in-line optical integrated and stand-alone metrology platforms. The metrology product portfolio, combined with our modeling algorithm software, delivers unique measurement capabilities for the most advanced semiconductor technology nodes.
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Customized Solutions
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Artifex Engineering GmbH & Co. KG
Our products form the basis of a wide range of R&D and industrial metrological applications. At Artifex Engineering we strive to maintain a close relationship with our customers to ensure that the products we deliver meet your needs cost effectively. We understand that your application is not standard and so we offer customization of all of our products, even for single units. Our manufacturing infrastructure includes rapid prototyping machinery and a flexible manufacturing environment allowing us to customize quickly and efficiently – a definite pricing advantage.
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Product
Process XRR, XRF, and XRD metrology FAB tool
MFM310
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Thickness, density, roughness & composition of films on blanket and patterned wafers. The Rigaku MFM310 performs high-precision measurements not possible by optical or ultrasonic techniques. This sophisticated X-ray metrology tool makes it practical to perform high-throughput measurements on product and blanket wafers ranging from ultrathin single-layer films to multilayer stacks.
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Adapter, 2.4 mm (m) to 3.5 mm (f), DC to 26.5 GHz
11901C
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The Keysight 11901C is a metrology grade, 2.4 mm male to 3.5 mm female adapter with dc to 26.5 GHz operation.
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Roundness & Form Measuring Instruments
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Taylor Hobson offers a world leading range surface form, surface finish and metrology solutions for 3D contour,ideal for the most demanding applications.
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Precision Shunts
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Ohm-Labs manufactures metrology grade shunts for precise measurement of current from <1 mA to 3000 A.
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High Accuracy Dimensional Metrology System
Pinnacle 250
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The Pinnacle features a damped granite base and column, with passive vibration isolation. A precision compound X-Y stage with high-speed linear motor drives provides velocity of 400 mm / sec and acceleration of 1000 mm / sec2. This combination of high acceleration and high velocity enables the high throughput required for near-line process monitoring.
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Laser Interferometers
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ZYGO laser interferometers support and enable the most demanding metrology applications in industries from semiconductor and lithography to space-borne imaging systems, cutting-edge consumer electronics, defense-related IR and thermal imaging systems and ophthalmics.
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Calibration
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Get the precision calibration tools you need to maintain the accuracy of your process, electrical, temperature, pressure, and flow measuring instruments and equipment. In addition, our in-house metrology lab will precalibrate an instrument at time of order or recalibrate equipment already owned. Our NIST-traceable calibration services and repairs help you meet your quality, regulatory, and compliance needs.
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3D Scanning System
CyberGage360
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Unprecedented combination of speed, accuracy and one-button simplicity for non-contact automated 3D scanning inspection.CyberGage360 dramatically Speeds Up Quality Assurance of Incoming Parts Inspection & In-Process Inspection of components on the manufacturing floor; Lowers Cost of Quality & Speeds Up Product Time-to-Market. Designed for use in general purpose metrology, the CyberGage360 has a range of potential industrial applications from automotive to aerospace to consumer electronics, where high accuracy and high speed throughput are important.
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Advanced Stand-Alone AFM
SmartSPM
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The SmartSPM Scanning Probe Microscope is the first 100% automated system that offers its cutting-edge technology of ultra-fast, metrological and high-resolution measurements for the most advanced materials research at the nanoscale in all AFM and STM modes. With the SmartSPM zooming in from large up to 100 µm overview scans down to atomic resolution has become a reality. Its design has been specially developed to be capable of being seamlessly integrated with optical spectroscopies (SNOM, Raman, Photoluminescence and TERS/SERS techniques).
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Pulser Sensor, Sent Signal, CNEX/ATEX Certificates
SK-S
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Beijing SANKI Petroleum Technology Co., Ltd.
*convert the mechanical transmission signal of flow meter into electrical pulse signal* send the electrical pulse signal to main-board to realize the metrology function of the flow meter
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Non-contact 3D Optical Profilers
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LuphoScan platforms are interferometric, scanning metrology systems. They are designed to perform ultra precision non-contact 3D form measurements mainly of rotationally symmetric surfaces such as aspheric lenses.
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Laser Scanning Systems
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QFP markets manually handled and optically tracked 3D laser scanners that set new standards in the metrology measurement industry. The products are characterized by exceptional performance, ease of use and cost-effectiveness and are the perfect solution for the metrology room as well as for the production line, stand-alone or automated.
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DC Current Shunts
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DC current shunts / standards are true 4-terminal devices that precisely measure DC currents from 10 A to 10,000 A. They use special alloys in the resistive elements which are supported on an insulating base for mechanical stability. The 9230A includes special features to reduce the effects of power dissipation and associated self heating errors. These shunts are designed to operate in air at full rated current. These are the best performing, and most widely used, DC metrology shunts in the world.
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Benchtop Metrology Solution
FilmTek 2000 PAR-SE
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Scientific Computing International
Our most advanced benchtop metrology solution, engineered to meet the needs of nearly any advanced thin film measurement application, from R&D to production. Combines spectroscopic ellipsometry and DUV multi-angle polarized reflectometry with a wide spectral range to deliver the highest accuracy, precision, and versatility in the industry. Patented parabolic mirror technology allows for a small spot size down to 50µm, ideal for direct measurement of product wafers and patterned films.
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Reticle Manufacturing
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An error-free reticle (also known as a photomask or mask) represents a critical element in achieving high semiconductor device yields, since reticle defects or pattern placement errors can be replicated in many die on production wafers. Reticles are built upon blanks: substrates of quartz deposited with absorber films. KLA’s portfolio of reticle inspection, metrology and data analytics systems help blank, reticle and IC manufacturers identify reticle defects and pattern placement errors, thereby reducing yield risk.
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Stylus Profilometers
Tencor™
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KLA Instruments™ Alpha-Step®, Tencor P- and HRP®-series stylus profilometers deliver high-precision, 2D and 3D surface metrology, measuring step height, surface roughness, bow and stress with industry-leading stability and reliability for your R&D and production requirements.
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Thermal Warpage and Strain Measurement Tool
PS200S
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The TherMoir PS200S is a metrology solution that utilizes the shadow moir measurement technique combined with automated phase-stepping to characterize out-of-plane displacement forsamples up to 150 mm x 200 mm. With time-temperature profiling capability, the TherMoir PS200S captures a complete history of a sample's behavior during a user-defined thermal excursion.
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Wafer Inspection Products
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Sonix provides manual and automated wafer inspection and metrology systems for wafers ranging from 100mm to 300mm, with extensive analysis capabilities at both the wafer and device level. These industry-leading automated wafer inspection systems are used by the world’s top manufacturers to ensure quality from development through production.
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Software Development Kit
Verisurf SDK
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Available free with all version after Verisurf 2017 – the Verisurf Software Development Kit (or “SDK”) provides a flexible programming environment specifically designed for creating customized dimensional metrology applications that enable manufacturing automation.
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Toolmakers Microscope
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Sinowon Innovation Metrology Manufacture Ltd.
It is widely used in mechanical, meter, electronic and light industry; university, Institute and metrology department. The measuring profile projector can detect the contour dimension and surface shape of variety complex workpiece, such as templates, punching pieces, cams, threads, gears, molding milling cutters.
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Biconical Antennas
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TDK Biconical Antennas - precision biconical antenna, metrology biconical antenna, high power biconical antenna.
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Industrial Calibrators
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A temperature calibrator, often called a thermometer calibrator, is used to correct inaccuracies in installed thermometers and temperature sensors, because temperature measurement is a critical parameter in many industrial processes. Although simulators are sometimes called temperature calibrators or thermometer calibrators and may be used to provide thermometer calibration for the electronics in an installed system, a temperature source with a calibrated reference sensor is still required to provide a complete and meaningful calibration. Fluke Calibration industrial and field temperature calibrators include: Metrology Wells; Field Metrology Wells; field dry-well calibrators; handheld dry block calibrators; Micro-Baths; large target infrared calibrators; field IR calibrators; ice-point dry-well; and thermocouple furnaces.
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CAD Software
Verisurf CAD
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Verisurf CAD is the foundation of all Verisurf suites and makes our software unique in the metrology industry. Verisurf software is different because it not only imports every major CAD file format; it is a complete 3D modeling application.Verisurf is the only metrology software that includes wireframe modeling, NURBS surfacing, Parasolid solid modeling, 2D drafting, and Model-Based Definition (MBD) that automates manufacturing.
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Inductance Standard
1482 Series
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The GenRad 1482 Standard Inductors are the standard of choice in metrology labs. Used today by national metrology institutes and primary standards bodies around the world, these inductors have no peer or equivlent.
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Optical Gaging Products
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Quality Vision International Inc.
OGP® pioneered multisensor measurement with vision, touch probe and laser sensors. For over 75 years, OGP has consistently led with a succession of innovative systems and sensors to tackle the most difficult measurement challenges, especially as it pertains to the medical industry. Multisensor metrology is a preferred quality control technology for manufacturers to develop, maintain, and improve the quality of medical devices.
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Micrometers
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Is a device incorporating a calibrated screw widely used for accurate measurement of components in mechanical engineering and machining as well as most mechanical trades, along with other metrological instruments such as dial, vernier, and digital calipers.
