Metrology
field of measurement.
See Also: Measurement, Instrumentation, Coordinate Measuring Machines
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Product
Metrology System
Echo
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The Echo system is a comprehensive in-line metal film metrology tool for single and multi-layer metal film measurements in leading-edge logic, memory, advanced packaging, and specialty semiconductor devices.
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Product
First Article Inspection Services
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API’s, on-site, first article measurement services provide inspection data on parts and assemblies with direct comparison against CAD models or drawings. Generated 3D measurement data from our portable metrology equipment and 3D scanners offers a comprehensive analysis of the physical part under measurement. Inspection reports can include 3D color maps or generated 3D models for detailed computer analysis.
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Product
Coordinate Measuring Machines
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The LK Metrology range of Coordinate Measuring Machines represent the ultimate in CMM technology. Designed and manufactured using only the highest quality materials, they carry a heritage of over 55 years experience and expertise. LK CMMs deliver the ability to perform dimensional, positional and surface measurement in a single system.
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Product
microRSP
M200
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The window of acceptable sheet resistance is shrinking with each technology node resulting in increasingly more rigorous standards for scale and accuracy of metrology tools. The shortcomings of traditional types of 4 point probes are becoming more and more evident. By developing the microRSP-M200, a unique tool for measuring the sheet resistance of conducting films, hereunder ultra shallow junctions (USJ’s), CAPRES A/S has responded to the growing need for reliable sheet resistance measurements on micro scale.
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Product
Adapter, 2.4 mm (m) to APC-7, DC to 18 GHz
11902A
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The Keysight 11902A is a 2.4 mm male to APC-7, metrology grade adapter with dc to 18 GHz operation.
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Product
In-Line Spectroscopic Ellipsometer for Web Coater and Roll to Roll Systems
UVISEL
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The UVISEL Spectroscopic Phase Modulated Ellipsometer is a turn-key thin film metrology instrument for in-line measurement of thin film thickness and optical properties. It features rapid measurement capability with data acquired every 50 ms for powerful control of thin film uniformity across the entire web.The design of the UVISEL ellipsometric heads allows simple integration into roll-to-roll systems, while the software provides advanced communication capabilities suited to roll-to-roll production.
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Product
Metra Scan 3D
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The most accurate scanning and probing solutions, whether in lab or on the shop floor.Highly accurate measurementDynamic referencingComplete metrology solution
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Product
Atomic Force Microscope
XE-PTR
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Park Systems' PTR Series is a fully automatic industrial in-line AFM solution for, but not limited to, automatic Pole Tip Recession measurements on Rowbar-level, individual Slider-level, and HGA-level sliders. With sub-nano scale accuracy, repeatability, and throughput, the PTR Series is the metrology tool of choice for Slider manufacturers to improve their overall production yield.
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Product
Digital Torque Meter Torsion Tester
HN-1E~20E
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Shenzhen Chuangxin Instruments Co., Ltd.
Digital Torque Meter is an intelligent metrologic instrument, which is designed for various torque test and calibration. It's mainly used for electic/manual torque drive, torque screwdrivers, bolt driver, tension wrench and other testers and products which refer to tightening force. It is widely applied in these industries, such as electrical manufacturing, machine manufacturing, car light industry, professional research and tests, and so on.
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Product
Stationary Test Equipment
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Single- and three-phase, standardized and individual test systems are covering all legal metrological test requirements for simple meters, high precision multifunction meters, smart meters and reference standards. Flexible and modular system components for the optimal customer orientated solution.
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Product
INnLline Metrology Automated & Robotized Solutions
Automation projects
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Bring automation to an existing manual inspection process. Integrate 3D measurements on the shop floor for better traceability. Increase part inspection throughput and reduce cycle times and costs.
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Product
Smart Factory Inspection System
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API, recognizing manufacturing industry’s increasing demand for part measurement automation, with a higher degree of accuracy, has developed its Smart Factory Inspection System with true 6 Degrees of Freedom (6DoF) real-time 3D robotic measurement incorporating its proven metrology technology and calibration components.SFIS can be delivered as a customized integrated solution or as a standard production inspection cell.
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Product
Micro-spot Spectroscopic Reflectometry
FilmTek 2000M
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Scientific Computing International
Micro-spot size benchtop metrology system engineered for unparalleled versatility and high performance, meeting the needs of patterned film applications requiring a very small spot size. Allows for measurement spot sizes as small as 2µm, and delivers reliable measurement of both thin and thick films.
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Product
Optical Thin-Film Metrology for Advanced Thin Films
FilmTek 6000 PAR-SE
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Scientific Computing International
Production-proven metrology system for film thickness, refractive index and stress measurement for a broad range of film layers at the 1x nm design node and beyond. Accommodates 200 or 300 mm wafer metrology. Combines spectroscopic ellipsometry and DUV multi-angle polarized reflectometry with a wide spectral range to meet the challenging demands associated with multi-patterning and other leading-edge device fabrication techniques.
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Product
SlipFinder
YIS and SF Series
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The YIS and SF Series metrology systems are designed for optical detection of wafer defects such as crystaldislocations, slip and other defects. The YIS-300HM (for 300 mm wafers) and YIS-200HM (for 200 mm wafers) utilizeMakyoh optics technology (Magic Mirror) and integrated robotic wafer handler provided by Hologenix.The SF300M and SF300N systems offer a low cost functionally equivalent alternative to the YIS series.
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Product
3D Scanning Software
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Software is a comprehensive component to any advanced metrology system. Combined with laptops and portable equipment, 3D scanning and measurement is now possible virtually anywhere. 3D scanner software plays a critical role in every stage from the creation of a concept design to the manufacturing and inspection of prototypes. Below is a look at some of the Laser Scanner Software and 3D Scanner Software providers and platforms we represent and handle.
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Product
Benchtop Metrology System
FilmTek 2000 SE
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Scientific Computing International
Benchtop metrology system delivering unmatched measurement performance, versatility, and speed for unpatterned thin to thick film applications. Ideally suited for academic and R&D settings. Combines spectroscopic rotating compensator ellipsometry, multi-angle polarized spectroscopic reflection, and intuitive material modeling software to make even the most demanding of measurement tasks simple and reliable.
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Product
Multi-Surface Profiler
Tropel® FlatMaster® MSP
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The Tropel® FlatMaster® MSP (Multi-Surface Profiler) is a frequency stepping interferometer that provides fast and accurate metrology for semiconductor wafers up to 300mm in diameter. In seconds up to 3 million data points are collected with sub-micron accuracy enabling total thickness and flatness characterization over the entire surface.
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Product
Horizontal Arm CMMs
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As a system provider, ZEISS offers just the solutions for the changing conditions of day-to-day measuring tasks with impressive accuracy, effectiveness, and above all, dependability. From the first consultation on the installation, to the maintenance of your measuring machines, ZEISS takes charge of your metrology. You get all the services and products from the same partner – and all optimally matched to each other.
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Product
Surface Measurement Instrument
SMI
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Redefining speed and accuracy in non-contact metrology, the Optikos SMI is a high-speed surface topography instrument that characterizes spherical, toric, and aspheric surfaces. The SMI measures surface shape deviations of precision surfaces using wavefront analysis technology. Configured to measure such items as: micro-optics, ball lenses, and contact lens molds, the instrument allows users to easily measure aspheric and toric parts without the need for reference surfaces.
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Product
Metrology
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Berliner Glas KGaA Herbert Kubatz GmbH & Co.
We make use of extensive measurement techniques and develop individual measurement setups in order to ensure that our optical components, assemblies and systems comply with your specifications. We create own software to measure customer-specific parameters.
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Product
Primary Standard Capacitors
GenRad 1404 Series
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The GenRad 1404 Series standard capacitors are the standard of choice in metrology labs, and still used today by standards bodies around the world. These capacitors have been designed as primary reference standards of capacitance with which working standards can be compared.
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Product
RF Calibration Kit
SMK-3000
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The SMK calibration kits are precision, high power calibration standards that are used to calibrate RF radios, wattmeters, directional couplers and other high-power RF test equipment in the field or metrology lab. Unlike other calibration solutions, the SMK-3000 calibration kits reduce the cost of ownership and provide a much faster time-to-calibration with lab precision and accuracy you’ve come to expect from Bird.
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Product
Metrology
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Optical critical dimension (OCD) metrology and film metrology require accuracy and repeatability. Onto Innovation's techniques are well-established and trusted by semiconductor manufacturers around the globe.
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Product
Precision LCR Meter
1693
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The GenRad 1693 LCR Meter Bridge gives you the best combination of features, in an LCR meter, to meet your most demanding testing requirements. It's a versatile, flexible instrument with a full range of programmable test frequencies, speeds, and voltages. An easy to understand display show both primary and secondary measurement parameters. The Digibridge is an excellent choice for metrology applications requiring accurate and repeatable measurements. The 1693 is also widely used in production testing, incoming inspection, component design and evaluation, process monitoring or dielectric measurement applications.
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Product
Infrared Microscope
DDR200/300 NIR
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The McBain DDR200 NIR (for 200mm) and DDR300 NIR (for 300mm) provide high-speed defect detection and precision measurement on wafers and other parts. These cost-efficient systems offer unique advantages for both production and process development use, providing an optimum near-infrared (900-1700nm) solution when both subsurface defect detection and dimensional metrology are required.
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Product
Thin Film Metrology Systems
Gemini Series
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The n&k Gemini-TF, Gemini-TF-M and Gemini-FPD are specifically designed for measurements of patterned and unpatterned films on transparent or opaque substrates. These tools are used extensively for solar cell, flat panel and photomask applications. The tools belonging to the Gemini-TF Series are based on unpolarized Reflectance (R) and unpolarized Transmittance (T) measurements, with a 50μm spot size for both R and T. R and T are simultaneously measured to determine film thickness and n and k spectra from 190nm – 1000nm
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Product
Stylus Profilometers
Tencor™
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KLA Instruments™ Alpha-Step®, Tencor P- and HRP®-series stylus profilometers deliver high-precision, 2D and 3D surface metrology, measuring step height, surface roughness, bow and stress with industry-leading stability and reliability for your R&D and production requirements.
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Product
Three-Phase Meter Test Equipment
ASTEL 3.2 TYPE
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ASTeL 3.2 meter test equipment is a fully automatic system that enables simultaneous, multi-position calibration and verification of three-phase electric energy meters. ASTeL 3.2 offers full compatibility with IEC 60736. Thanks to excellent parameters, superior functionality and outstanding flexibility, ASTeL 3.2 is an ideal solution for utility companies, energy meter manufacturers, governmental institutes of metrology, metrological laboratories, and other customers interested in electricity meters testing.
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Product
Precision Connectors
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Rosenberger Hochfrequenztechnik GmbH & Co. KG
Connectors form the electronic bridge for active and passive components and devices in a variety of applications. In the laboratory and metrology sector – for example in research and development, testing or quality assurance departments – precision connectors are used due to the detailed requirements for technology and processes.





























